Study of a platinum (Pt) nanoparticle (NP)/Vanadium pentoxide (V2O5) thin film-based ammonia gas sensor

Yen Lin Pan, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


A new and interesting ammonia (NH3) gas sensor, based on incorporating a radio frequency (RF) sputtered vanadium pentoxide (V2O5) thin film and thermal evaporated platinum (Pt) nanoparticles (NPs), is fabricated and studied herein. The studied Pt NP/V2O5 device demonstrates abnormal p-type conductive behavior, presumably caused by the presence of an inversion (hole) layer on the surface of the n-type V2O5 thin film. The employment of Pt NPs effectively enhances the specific surface area, catalytic activity, and related ammonia sensing properties. Experimentally, a high sensing response ratio for SR of 83.2% under 1000 ppm NH3/air gas and a very low detecting level of 100 ppb NH3/air with a relatively fast sensing speed are obtained at the optimum temperature of 300 °C. The studied device also shows the advantages of a simple structure, good selectivity, easy fabrication, and stable and reversible sensing performance. Therefore, the studied Pt NP/V2O5 thin film structure provides potential for high-performance ammonia sensing applications.

Original languageEnglish
Article number9058991
Pages (from-to)2126-2132
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number5
Publication statusPublished - 2020 May

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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