Study of a WO3 thin film based hydrogen gas sensor decorated with platinum nanoparticles

Ching Hong Chang; Tzu Chieh Chou; Wei Cheng Chen; Jing Shiuan Niu; Kun Wei Lin; Shiou Ying Cheng; Jung Hui Tsai; Wen Chau Liu

doi:10.1016/j.snb.2020.128145

Study of a WO₃ thin film based hydrogen gas sensor decorated with platinum nanoparticles

Ching Hong Chang, Tzu Chieh Chou, Wei Cheng Chen, Jing Shiuan Niu, Kun Wei Lin, Shiou Ying Cheng, Jung Hui Tsai, Wen Chau Liu

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

70 Citations (Scopus)

Abstract

A simple platinum nanoparticle (Pt NP)/WO₃ semiconducting metal oxide (SMO)-based structure is fabricated and completely studied as a hydrogen gas sensor. In this work, simple rapid thermal evaporation (RTE) was employed to fabricate Pt NPs. This approach could easily produce Pt NPs with a small grain size and uniformity on the WO₃ thin film. Experimentally, at 200 °C, the studied device exhibited an excellent hydrogen sensing response of 1.41 × 10⁶ (under a 1% H₂/air gas), a very low detecting level of 1 ppm H₂/air, and a relatively shorter response (recovery) time of 201 s (26) s. Moreover, first order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) were also employed to overcome the wireless transmission problem for the Internet of Things (IoTs). Furthermore, based on the thermodynamic analysis, the surface coverage performance was studied for this device. As the result, the studied device exhibited practically adsorption with hydrogen gas at 200 °C. The studied device is therefore promising for high-performance hydrogen sensing applications.

Original language	English
Article number	128145
Journal	Sensors and Actuators, B: Chemical
Volume	317
DOIs	https://doi.org/10.1016/j.snb.2020.128145
Publication status	Published - 2020 Aug 15

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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title = "Study of a WO3 thin film based hydrogen gas sensor decorated with platinum nanoparticles",

abstract = "A simple platinum nanoparticle (Pt NP)/WO3 semiconducting metal oxide (SMO)-based structure is fabricated and completely studied as a hydrogen gas sensor. In this work, simple rapid thermal evaporation (RTE) was employed to fabricate Pt NPs. This approach could easily produce Pt NPs with a small grain size and uniformity on the WO3 thin film. Experimentally, at 200 °C, the studied device exhibited an excellent hydrogen sensing response of 1.41 × 106 (under a 1% H2/air gas), a very low detecting level of 1 ppm H2/air, and a relatively shorter response (recovery) time of 201 s (26) s. Moreover, first order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) were also employed to overcome the wireless transmission problem for the Internet of Things (IoTs). Furthermore, based on the thermodynamic analysis, the surface coverage performance was studied for this device. As the result, the studied device exhibited practically adsorption with hydrogen gas at 200 °C. The studied device is therefore promising for high-performance hydrogen sensing applications.",

author = "Chang, {Ching Hong} and Chou, {Tzu Chieh} and Chen, {Wei Cheng} and Niu, {Jing Shiuan} and Lin, {Kun Wei} and Cheng, {Shiou Ying} and Tsai, {Jung Hui} and Liu, {Wen Chau}",

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year = "2020",

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doi = "10.1016/j.snb.2020.128145",

language = "English",

volume = "317",

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T1 - Study of a WO3 thin film based hydrogen gas sensor decorated with platinum nanoparticles

AU - Chang, Ching Hong

AU - Chou, Tzu Chieh

AU - Chen, Wei Cheng

AU - Niu, Jing Shiuan

AU - Lin, Kun Wei

AU - Cheng, Shiou Ying

AU - Tsai, Jung Hui

AU - Liu, Wen Chau

PY - 2020/8/15

Y1 - 2020/8/15

N2 - A simple platinum nanoparticle (Pt NP)/WO3 semiconducting metal oxide (SMO)-based structure is fabricated and completely studied as a hydrogen gas sensor. In this work, simple rapid thermal evaporation (RTE) was employed to fabricate Pt NPs. This approach could easily produce Pt NPs with a small grain size and uniformity on the WO3 thin film. Experimentally, at 200 °C, the studied device exhibited an excellent hydrogen sensing response of 1.41 × 106 (under a 1% H2/air gas), a very low detecting level of 1 ppm H2/air, and a relatively shorter response (recovery) time of 201 s (26) s. Moreover, first order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) were also employed to overcome the wireless transmission problem for the Internet of Things (IoTs). Furthermore, based on the thermodynamic analysis, the surface coverage performance was studied for this device. As the result, the studied device exhibited practically adsorption with hydrogen gas at 200 °C. The studied device is therefore promising for high-performance hydrogen sensing applications.

AB - A simple platinum nanoparticle (Pt NP)/WO3 semiconducting metal oxide (SMO)-based structure is fabricated and completely studied as a hydrogen gas sensor. In this work, simple rapid thermal evaporation (RTE) was employed to fabricate Pt NPs. This approach could easily produce Pt NPs with a small grain size and uniformity on the WO3 thin film. Experimentally, at 200 °C, the studied device exhibited an excellent hydrogen sensing response of 1.41 × 106 (under a 1% H2/air gas), a very low detecting level of 1 ppm H2/air, and a relatively shorter response (recovery) time of 201 s (26) s. Moreover, first order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) were also employed to overcome the wireless transmission problem for the Internet of Things (IoTs). Furthermore, based on the thermodynamic analysis, the surface coverage performance was studied for this device. As the result, the studied device exhibited practically adsorption with hydrogen gas at 200 °C. The studied device is therefore promising for high-performance hydrogen sensing applications.

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JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

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Study of a WO₃ thin film based hydrogen gas sensor decorated with platinum nanoparticles

Abstract

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