TY - JOUR
T1 - Study of an electroless plating (EP)-based Pt/AlGaN/GaN Schottky diode-type ammonia sensor
AU - Chou, Po Cheng
AU - Chen, Huey Ing
AU - Liu, I. Ping
AU - Hung, Ching Wen
AU - Chen, Chun Chia
AU - Liou, Jian Kai
AU - Liu, Wen Chau
N1 - Funding Information:
Part of this work was supported by the Ministry of Science and Technology of the Republic of China under Contracts No. NSC-100-2221-E-006-044-MY3 and No. NSC-101-2221-E-006-142-MY3.
PY - 2014/11
Y1 - 2014/11
N2 - An ammonia sensor based on a Pt/AlGaN/GaN Schottky diode, fabricated by the electroless plating (EP) technique, has been studied in this work. The studied sensor device shows a significant sensing response under an extremely low ammonia concentration of 10 ppb NH3/air at 115 °C. As exposed to a 1000 ppm NH3/air gas, a high sensing response of 16.22 with a response (recovery) time of 8.73 (2.04) min is obtained. Even at room temperature (25°C), the studied sensor exhibits good ammonia sensing performance with a sensing response of 2.68 at 1000 ppm NH3/air and a low detection limit of 1 ppm NH3/air. Based on the excellent sensing performance and inherent advantages of low-power consumption and low-temperature operation, the studied sensor device provides the promise for high-performance ammonia sensing applications.
AB - An ammonia sensor based on a Pt/AlGaN/GaN Schottky diode, fabricated by the electroless plating (EP) technique, has been studied in this work. The studied sensor device shows a significant sensing response under an extremely low ammonia concentration of 10 ppb NH3/air at 115 °C. As exposed to a 1000 ppm NH3/air gas, a high sensing response of 16.22 with a response (recovery) time of 8.73 (2.04) min is obtained. Even at room temperature (25°C), the studied sensor exhibits good ammonia sensing performance with a sensing response of 2.68 at 1000 ppm NH3/air and a low detection limit of 1 ppm NH3/air. Based on the excellent sensing performance and inherent advantages of low-power consumption and low-temperature operation, the studied sensor device provides the promise for high-performance ammonia sensing applications.
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U2 - 10.1016/j.snb.2014.06.113
DO - 10.1016/j.snb.2014.06.113
M3 - Article
AN - SCOPUS:84905590055
SN - 0925-4005
VL - 203
SP - 258
EP - 262
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
ER -