Study of an electroless plating (EP)-based Pt/AlGaN/GaN Schottky diode-type ammonia sensor

Po Cheng Chou, Huey Ing Chen, I. Ping Liu, Ching Wen Hung, Chun Chia Chen, Jian Kai Liou, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


An ammonia sensor based on a Pt/AlGaN/GaN Schottky diode, fabricated by the electroless plating (EP) technique, has been studied in this work. The studied sensor device shows a significant sensing response under an extremely low ammonia concentration of 10 ppb NH3/air at 115 °C. As exposed to a 1000 ppm NH3/air gas, a high sensing response of 16.22 with a response (recovery) time of 8.73 (2.04) min is obtained. Even at room temperature (25°C), the studied sensor exhibits good ammonia sensing performance with a sensing response of 2.68 at 1000 ppm NH3/air and a low detection limit of 1 ppm NH3/air. Based on the excellent sensing performance and inherent advantages of low-power consumption and low-temperature operation, the studied sensor device provides the promise for high-performance ammonia sensing applications.

Original languageEnglish
Pages (from-to)258-262
Number of pages5
JournalSensors and Actuators, B: Chemical
Publication statusPublished - 2014 Nov

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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