Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering

Yu Ming Lin, Chien Hsun Chu, Hung Wei Wu, Jow-Lay Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

Original languageEnglish
Title of host publicationIMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015
EditorsDavid Dagan Feng, S. I. Ao, Craig Douglas, S. I. Ao, Craig Douglas, Jeong-A Lee, S. I. Ao, Oscar Castillo
PublisherNewswood Limited
Pages807-810
Number of pages4
ISBN (Electronic)9789881925398
Publication statusPublished - 2015 Jan 1
EventInternational MultiConference of Engineers and Computer Scientists 2015, IMECS 2015 - Tsimshatsui, Kowloon, Hong Kong
Duration: 2015 Mar 182015 Mar 20

Publication series

NameLecture Notes in Engineering and Computer Science
Volume2
ISSN (Print)2078-0958

Other

OtherInternational MultiConference of Engineers and Computer Scientists 2015, IMECS 2015
CountryHong Kong
CityTsimshatsui, Kowloon
Period15-03-1815-03-20

Fingerprint

Magnetron sputtering
Structural properties
Electric properties
Optical properties
Annealing
Thin films
Hydrogen
Opacity
Zinc oxide
Carrier concentration
Solar cells
Display devices
Vacuum
Aluminum
Glass
Temperature
Electrodes
Substrates

All Science Journal Classification (ASJC) codes

  • Computer Science (miscellaneous)

Cite this

Lin, Y. M., Chu, C. H., Wu, H. W., & Huang, J-L. (2015). Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. In D. D. Feng, S. I. Ao, C. Douglas, S. I. Ao, C. Douglas, J-A. Lee, S. I. Ao, ... O. Castillo (Eds.), IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015 (pp. 807-810). (Lecture Notes in Engineering and Computer Science; Vol. 2). Newswood Limited.
Lin, Yu Ming ; Chu, Chien Hsun ; Wu, Hung Wei ; Huang, Jow-Lay. / Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. editor / David Dagan Feng ; S. I. Ao ; Craig Douglas ; S. I. Ao ; Craig Douglas ; Jeong-A Lee ; S. I. Ao ; Oscar Castillo. Newswood Limited, 2015. pp. 807-810 (Lecture Notes in Engineering and Computer Science).
@inproceedings{8061be01e470446ab48109271cf529b5,
title = "Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering",
abstract = "In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 {\%} in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.",
author = "Lin, {Yu Ming} and Chu, {Chien Hsun} and Wu, {Hung Wei} and Jow-Lay Huang",
year = "2015",
month = "1",
day = "1",
language = "English",
series = "Lecture Notes in Engineering and Computer Science",
publisher = "Newswood Limited",
pages = "807--810",
editor = "Feng, {David Dagan} and Ao, {S. I.} and Craig Douglas and Ao, {S. I.} and Craig Douglas and Jeong-A Lee and Ao, {S. I.} and Oscar Castillo",
booktitle = "IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015",

}

Lin, YM, Chu, CH, Wu, HW & Huang, J-L 2015, Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. in DD Feng, SI Ao, C Douglas, SI Ao, C Douglas, J-A Lee, SI Ao & O Castillo (eds), IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. Lecture Notes in Engineering and Computer Science, vol. 2, Newswood Limited, pp. 807-810, International MultiConference of Engineers and Computer Scientists 2015, IMECS 2015, Tsimshatsui, Kowloon, Hong Kong, 15-03-18.

Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. / Lin, Yu Ming; Chu, Chien Hsun; Wu, Hung Wei; Huang, Jow-Lay.

IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. ed. / David Dagan Feng; S. I. Ao; Craig Douglas; S. I. Ao; Craig Douglas; Jeong-A Lee; S. I. Ao; Oscar Castillo. Newswood Limited, 2015. p. 807-810 (Lecture Notes in Engineering and Computer Science; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering

AU - Lin, Yu Ming

AU - Chu, Chien Hsun

AU - Wu, Hung Wei

AU - Huang, Jow-Lay

PY - 2015/1/1

Y1 - 2015/1/1

N2 - In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

AB - In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

UR - http://www.scopus.com/inward/record.url?scp=84937942065&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84937942065&partnerID=8YFLogxK

M3 - Conference contribution

T3 - Lecture Notes in Engineering and Computer Science

SP - 807

EP - 810

BT - IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015

A2 - Feng, David Dagan

A2 - Ao, S. I.

A2 - Douglas, Craig

A2 - Ao, S. I.

A2 - Douglas, Craig

A2 - Lee, Jeong-A

A2 - Ao, S. I.

A2 - Castillo, Oscar

PB - Newswood Limited

ER -

Lin YM, Chu CH, Wu HW, Huang J-L. Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering. In Feng DD, Ao SI, Douglas C, Ao SI, Douglas C, Lee J-A, Ao SI, Castillo O, editors, IMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015. Newswood Limited. 2015. p. 807-810. (Lecture Notes in Engineering and Computer Science).