Study of AZO thin films under different annealing atmosphere on structural, optical and electrical properties by RF magnetron sputtering

Yu Ming Lin, Chien Hsun Chu, Hung Wei Wu, Jow-Lay Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, the transparent conductive aluminum-doped zinc oxide (ZnO: Al, AZO) thin films with different annealing conditions are studied. The AZO thin films were prepared on the Coring glass substrate by RF magnetron sputtering. The AZO thin films were annealed in atmosphere of vacuum and hydrogen at temperatures from 100 to 400°C in steps of 100°C for 1 min, respectively, to investigate the effects of annealing on electrical and optical properties of the films. Optimization of the prepared thin films shows low resistivity of 6.04 × 10-4 Ω-cm, mobility of 5.213 cm2/V-s, carrier concentration of 7.147 × 1020 cm-3 and a average optical transmittance of 84.89 % in the visible range at 200°C annealing temperature in hydrogen are obtained. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.

Original languageEnglish
Title of host publicationIMECS 2015 - International MultiConference of Engineers and Computer Scientists 2015
EditorsDavid Dagan Feng, S. I. Ao, Craig Douglas, S. I. Ao, Craig Douglas, Jeong-A Lee, S. I. Ao, Oscar Castillo
PublisherNewswood Limited
Pages807-810
Number of pages4
ISBN (Electronic)9789881925398
Publication statusPublished - 2015 Jan 1
EventInternational MultiConference of Engineers and Computer Scientists 2015, IMECS 2015 - Tsimshatsui, Kowloon, Hong Kong
Duration: 2015 Mar 182015 Mar 20

Publication series

NameLecture Notes in Engineering and Computer Science
Volume2
ISSN (Print)2078-0958

Other

OtherInternational MultiConference of Engineers and Computer Scientists 2015, IMECS 2015
CountryHong Kong
CityTsimshatsui, Kowloon
Period15-03-1815-03-20

All Science Journal Classification (ASJC) codes

  • Computer Science (miscellaneous)

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