Study of beveled angle effect on morphology of dual damascene via filling using ionized physical vapor deposition

Chi Chuan Hwang, Jee Gong Chang, Ming Hang Weng, Hong Chang Lin

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2404-2410
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003 Jan 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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