@article{69f5b52fbd7c4333bb63c368bbc77523,
title = "Study of beveled angle effect on morphology of dual damascene via filling using ionized physical vapor deposition",
author = "Hwang, {Chi Chuan} and Chang, {Jee Gong} and Weng, {Ming Hang} and Lin, {Hong Chang}",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2003",
doi = "10.1116/1.1623511",
language = "English",
volume = "21",
pages = "2404--2410",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}