Study of InGaP/InGaAs double delta-doped channel heterostructure field-effect transistors

Hung Ming Chuang, Shiou Ying Cheng, Chun Yuan Chen, Xin Da Liao, Po Hsien Lai, Chung I. Kao, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)832-837
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number2
DOIs
Publication statusPublished - 2004 Jan 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Study of InGaP/InGaAs double delta-doped channel heterostructure field-effect transistors'. Together they form a unique fingerprint.

Cite this