Abstract
The ZrN films were grown on Si substrates using dc magnetron sputtering where the substrate bias is varied from -45 to 50 V. The positive substrate bias increases in hardness and elastic modulus, while negative bias enhances hardness and toughness.
Original language | English |
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Pages (from-to) | 715-719 |
Number of pages | 5 |
Journal | Scripta Materialia |
Volume | 51 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2004 Jul 1 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics