Study of microwave dielectric properties of perovskite thin films by near-field microscopy

Yi-Chun Chen, Yun Shuo Hsieh, Hsiu Fung Cheng, I. Nan Lin

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Perovskite thin film materials possess good dielectric properties, which vary with applied voltage, and have thus been thoroughly investigated for applications as thin film tunable microwave devices. However, the tunability of the thin film materials derived from the frequency response of the thin film devices suffers from ambiguity in extracting the true dielectric response of the thin film materials in microwave frequency regime. To circumvent such a difficulty, we investigated the dielectric properties of perovskite thin films by using a novel scanning evanescent microwave microscopy (SEMM). To extract the dielectric parameters from original microwave frequency response signal of SEMM probe, we perform a 3-dimensional (3D) finite element simulation to model the frequency behavior of the SEMM microwave probe. Dielectric images of the thin films with submicron resolution can be obtained by using such a near-field technique, which correlates very well with the morphology of the films examined by atomic force microscopy. Moreover, the dielectric images of dielectric thin films were compared to those of ferroelectric thin films in order to discuss the related dielectric mechanism of the materials.

Original languageEnglish
Pages (from-to)261-265
Number of pages5
JournalJournal of Electroceramics
Volume13
Issue number1-3
DOIs
Publication statusPublished - 2004 Jul 1

Fingerprint

Dielectric properties
Perovskite
dielectric properties
near fields
Microscopic examination
Microwaves
microscopy
microwaves
Thin films
thin films
Microwave frequencies
Scanning
Frequency response
microwave frequencies
frequency response
scanning
Thin film devices
Ferroelectric thin films
Microwave devices
microwave probes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Chen, Yi-Chun ; Hsieh, Yun Shuo ; Cheng, Hsiu Fung ; Lin, I. Nan. / Study of microwave dielectric properties of perovskite thin films by near-field microscopy. In: Journal of Electroceramics. 2004 ; Vol. 13, No. 1-3. pp. 261-265.
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Study of microwave dielectric properties of perovskite thin films by near-field microscopy. / Chen, Yi-Chun; Hsieh, Yun Shuo; Cheng, Hsiu Fung; Lin, I. Nan.

In: Journal of Electroceramics, Vol. 13, No. 1-3, 01.07.2004, p. 261-265.

Research output: Contribution to journalArticle

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