Study of nanoindentation using FEM atomic model

Yeau-Ren Jeng, Chung Ming Tan

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)


This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nanohardness varies with the maximum indentation depth and the geometry of the indenter.

Original languageEnglish
Pages (from-to)767-774
Number of pages8
JournalJournal of Tribology
Issue number4
Publication statusPublished - 2004 Oct 1

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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