TY - GEN
T1 - Study of nanoindentation using fem atomic model
AU - Jeng, Yeau Ren
AU - Tan, Chung Ming
PY - 2004/12/1
Y1 - 2004/12/1
N2 - This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nano-hardness varies with the maximum indentation depth and the geometry of the indenter.
AB - This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nano-hardness varies with the maximum indentation depth and the geometry of the indenter.
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M3 - Conference contribution
AN - SCOPUS:21244484690
SN - 0791841812
T3 - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
SP - 1607
EP - 1615
BT - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
T2 - 2004 ASME/STLE International Joint Tribology Conference
Y2 - 24 October 2004 through 27 October 2004
ER -