Study of nanoindentation using fem atomic model

Yeau-Ren Jeng, Chung Ming Tan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nano-hardness varies with the maximum indentation depth and the geometry of the indenter.

Original languageEnglish
Title of host publicationProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
Pages1607-1615
Number of pages9
EditionPART B
Publication statusPublished - 2004 Dec 1
Event2004 ASME/STLE International Joint Tribology Conference - Long Beach, CA, United States
Duration: 2004 Oct 242004 Oct 27

Publication series

NameProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
NumberPART B

Conference

Conference2004 ASME/STLE International Joint Tribology Conference
CountryUnited States
CityLong Beach, CA
Period04-10-2404-10-27

Fingerprint

Nanoindentation
Nanohardness
Thin films
Indentation
Plastic deformation
Crystalline materials
Geometry

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Jeng, Y-R., & Tan, C. M. (2004). Study of nanoindentation using fem atomic model. In Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004 (PART B ed., pp. 1607-1615). (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART B).
Jeng, Yeau-Ren ; Tan, Chung Ming. / Study of nanoindentation using fem atomic model. Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART B. ed. 2004. pp. 1607-1615 (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; PART B).
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Jeng, Y-R & Tan, CM 2004, Study of nanoindentation using fem atomic model. in Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART B edn, Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004, no. PART B, pp. 1607-1615, 2004 ASME/STLE International Joint Tribology Conference, Long Beach, CA, United States, 04-10-24.

Study of nanoindentation using fem atomic model. / Jeng, Yeau-Ren; Tan, Chung Ming.

Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART B. ed. 2004. p. 1607-1615 (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART B).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This paper adopts an atomic-scale model based on the nonlinear finite element formulation to analyze the stress and strain induced in a very thin film during the nanoindentation process. The deformation evolution during the nanoindentation process is evaluated using the quasi-static method, thereby greatly reducing the required computation time. The finite element simulation results indicate that the microscopic plastic deformation in the thin film is caused by instability of its crystalline structure, and that the magnitude of the nano-hardness varies with the maximum indentation depth and the geometry of the indenter.

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Jeng Y-R, Tan CM. Study of nanoindentation using fem atomic model. In Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART B ed. 2004. p. 1607-1615. (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; PART B).