Study of Pb(Zr 0.52 Ti 0.48 )O 3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors

Cheng Che Tsai, Yu Chun Chien, Cheng Shong Hong, Sheng-Yuan Chu, Chia-Ling Wei, Yun Hui Liu, Hsueh Yu Kao

Research output: Contribution to journalArticle

Abstract

In this study, piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thick films were fabricated on Pt-coated Si substrates by a modified sol-gel method via dispersing the piezoelectric submicron powders of composition (Pb, Sr)La x (Ti, Zr) 1-1/4x O 3 (PZT-5A, having a high d 33 value of 520 and a high k p value of 0.64) in the PZT sol-gel solution. Then, piezoelectric microelectromechanical system (MEMS) accelerometers were designed and fabricated on Si substrates via micromachining techniques. A mathematic approximation model was firstly proposed. It used an effective thickness of Si membrane (h eff ) to replace the thickness of Si membrane, derived by math theory. The resonant frequency using the mathematic approximation model would be closer to the values of the experimental data than using the original math theory. Finally, the self-made thick film accelerometers with best properties were fabricated via a modified sol-gel method. They had voltage sensitivities in the range of 2.21-2.14 mV/g, which is pretty high compared with the reported data, and the resonant frequency is in the range of 6.5-7.1 kHz. In addition, the accelerometers with amplifier circuit and power source were practically used in vibration detection of health monitoring of mechanical motors.

Original languageEnglish
Pages (from-to)4056-4066
Number of pages11
JournalJournal of the American Ceramic Society
Volume102
Issue number7
DOIs
Publication statusPublished - 2019 Jul 1

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Accelerometers
MEMS
Health
Thick films
Sol-gel process
Monitoring
Natural frequencies
Membranes
Micromachining
Substrates
Powders
Sol-gels
Networks (circuits)
Electric potential
Chemical analysis
lead titanate zirconate

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

Cite this

@article{9dc318ee46cf4fda9d5b1e6890f779d0,
title = "Study of Pb(Zr 0.52 Ti 0.48 )O 3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors",
abstract = "In this study, piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thick films were fabricated on Pt-coated Si substrates by a modified sol-gel method via dispersing the piezoelectric submicron powders of composition (Pb, Sr)La x (Ti, Zr) 1-1/4x O 3 (PZT-5A, having a high d 33 value of 520 and a high k p value of 0.64) in the PZT sol-gel solution. Then, piezoelectric microelectromechanical system (MEMS) accelerometers were designed and fabricated on Si substrates via micromachining techniques. A mathematic approximation model was firstly proposed. It used an effective thickness of Si membrane (h eff ) to replace the thickness of Si membrane, derived by math theory. The resonant frequency using the mathematic approximation model would be closer to the values of the experimental data than using the original math theory. Finally, the self-made thick film accelerometers with best properties were fabricated via a modified sol-gel method. They had voltage sensitivities in the range of 2.21-2.14 mV/g, which is pretty high compared with the reported data, and the resonant frequency is in the range of 6.5-7.1 kHz. In addition, the accelerometers with amplifier circuit and power source were practically used in vibration detection of health monitoring of mechanical motors.",
author = "Tsai, {Cheng Che} and Chien, {Yu Chun} and Hong, {Cheng Shong} and Sheng-Yuan Chu and Chia-Ling Wei and Liu, {Yun Hui} and Kao, {Hsueh Yu}",
year = "2019",
month = "7",
day = "1",
doi = "10.1111/jace.16255",
language = "English",
volume = "102",
pages = "4056--4066",
journal = "Journal of the American Ceramic Society",
issn = "0002-7820",
publisher = "Wiley-Blackwell",
number = "7",

}

Study of Pb(Zr 0.52 Ti 0.48 )O 3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors . / Tsai, Cheng Che; Chien, Yu Chun; Hong, Cheng Shong; Chu, Sheng-Yuan; Wei, Chia-Ling; Liu, Yun Hui; Kao, Hsueh Yu.

In: Journal of the American Ceramic Society, Vol. 102, No. 7, 01.07.2019, p. 4056-4066.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Study of Pb(Zr 0.52 Ti 0.48 )O 3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors

AU - Tsai, Cheng Che

AU - Chien, Yu Chun

AU - Hong, Cheng Shong

AU - Chu, Sheng-Yuan

AU - Wei, Chia-Ling

AU - Liu, Yun Hui

AU - Kao, Hsueh Yu

PY - 2019/7/1

Y1 - 2019/7/1

N2 - In this study, piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thick films were fabricated on Pt-coated Si substrates by a modified sol-gel method via dispersing the piezoelectric submicron powders of composition (Pb, Sr)La x (Ti, Zr) 1-1/4x O 3 (PZT-5A, having a high d 33 value of 520 and a high k p value of 0.64) in the PZT sol-gel solution. Then, piezoelectric microelectromechanical system (MEMS) accelerometers were designed and fabricated on Si substrates via micromachining techniques. A mathematic approximation model was firstly proposed. It used an effective thickness of Si membrane (h eff ) to replace the thickness of Si membrane, derived by math theory. The resonant frequency using the mathematic approximation model would be closer to the values of the experimental data than using the original math theory. Finally, the self-made thick film accelerometers with best properties were fabricated via a modified sol-gel method. They had voltage sensitivities in the range of 2.21-2.14 mV/g, which is pretty high compared with the reported data, and the resonant frequency is in the range of 6.5-7.1 kHz. In addition, the accelerometers with amplifier circuit and power source were practically used in vibration detection of health monitoring of mechanical motors.

AB - In this study, piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thick films were fabricated on Pt-coated Si substrates by a modified sol-gel method via dispersing the piezoelectric submicron powders of composition (Pb, Sr)La x (Ti, Zr) 1-1/4x O 3 (PZT-5A, having a high d 33 value of 520 and a high k p value of 0.64) in the PZT sol-gel solution. Then, piezoelectric microelectromechanical system (MEMS) accelerometers were designed and fabricated on Si substrates via micromachining techniques. A mathematic approximation model was firstly proposed. It used an effective thickness of Si membrane (h eff ) to replace the thickness of Si membrane, derived by math theory. The resonant frequency using the mathematic approximation model would be closer to the values of the experimental data than using the original math theory. Finally, the self-made thick film accelerometers with best properties were fabricated via a modified sol-gel method. They had voltage sensitivities in the range of 2.21-2.14 mV/g, which is pretty high compared with the reported data, and the resonant frequency is in the range of 6.5-7.1 kHz. In addition, the accelerometers with amplifier circuit and power source were practically used in vibration detection of health monitoring of mechanical motors.

UR - http://www.scopus.com/inward/record.url?scp=85059613246&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85059613246&partnerID=8YFLogxK

U2 - 10.1111/jace.16255

DO - 10.1111/jace.16255

M3 - Article

AN - SCOPUS:85059613246

VL - 102

SP - 4056

EP - 4066

JO - Journal of the American Ceramic Society

JF - Journal of the American Ceramic Society

SN - 0002-7820

IS - 7

ER -