Study of photo-resistance and polyimide strip by atmospheric plasma technology

Wen Jen Liu, Yung-Chiang Lan, Yong Chih Chen, Wan Chung Lo, Chao Hsien Lin

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

In this study, parallel-tube (PT) and plasma jet (PJ) dielectric barrier discharge (DBD) electrodes and alternating voltage (AC) generators with sinusoidal and pulsed types AC generators at voltage of 10 kV and frequency of 20 kHz, respectively, were selected for the investigation of the influences of these hardware combinations on the removal differences of photo-resistances (PRs) and polyimide (PI). Plasma ignition occurred with the flowing of clean dry air (CDA) for these self-designed PT- and PJ-DBD systems. The atmospheric plasma system consisting of PJ-DBD and pulsed type AC generator exhibited reasonable PR removal ability with no discharging phenomena and with more polar functional groups, and is recommended for these polymers removal.

Original languageEnglish
Pages (from-to)6530-6535
Number of pages6
JournalSurface and Coatings Technology
Volume201
Issue number15
DOIs
Publication statusPublished - 2007 Apr 23

Fingerprint

AC generators
Plasma jets
polyimides
Polyimides
plasma jets
strip
Plasmas
tubes
Electric potential
electric potential
Functional groups
ignition
Ignition
Polymers
hardware
Hardware
Electrodes
electrodes
air
polymers

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Liu, Wen Jen ; Lan, Yung-Chiang ; Chen, Yong Chih ; Lo, Wan Chung ; Lin, Chao Hsien. / Study of photo-resistance and polyimide strip by atmospheric plasma technology. In: Surface and Coatings Technology. 2007 ; Vol. 201, No. 15. pp. 6530-6535.
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Study of photo-resistance and polyimide strip by atmospheric plasma technology. / Liu, Wen Jen; Lan, Yung-Chiang; Chen, Yong Chih; Lo, Wan Chung; Lin, Chao Hsien.

In: Surface and Coatings Technology, Vol. 201, No. 15, 23.04.2007, p. 6530-6535.

Research output: Contribution to journalArticle

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AU - Liu, Wen Jen

AU - Lan, Yung-Chiang

AU - Chen, Yong Chih

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