Study of photo-resistance and polyimide strip by atmospheric plasma technology

Wen Jen Liu, Yung Chiang Lan, Yong Chih Chen, Wan Chung Lo, Chao Hsien Lin

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this study, parallel-tube (PT) and plasma jet (PJ) dielectric barrier discharge (DBD) electrodes and alternating voltage (AC) generators with sinusoidal and pulsed types AC generators at voltage of 10 kV and frequency of 20 kHz, respectively, were selected for the investigation of the influences of these hardware combinations on the removal differences of photo-resistances (PRs) and polyimide (PI). Plasma ignition occurred with the flowing of clean dry air (CDA) for these self-designed PT- and PJ-DBD systems. The atmospheric plasma system consisting of PJ-DBD and pulsed type AC generator exhibited reasonable PR removal ability with no discharging phenomena and with more polar functional groups, and is recommended for these polymers removal.

Original languageEnglish
Pages (from-to)6530-6535
Number of pages6
JournalSurface and Coatings Technology
Volume201
Issue number15
DOIs
Publication statusPublished - 2007 Apr 23

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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