Study of preferred orientation of zinc oxide films on the 64° LiNbO3 substrates and their applications as liquid sensors

Shiou Jen Jian, Sheng Yuan Chu, Tung Yi Huang, Walter Water

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10 Citations (Scopus)

Abstract

The growth of (002) orientation of zinc oxide (ZnO) films on 64° LiNbO3 substrates using rf magnetron sputtering system was demonstrated. It was shown that the film orientations and crystallinity were strongly dependent on the rf power, total chamber pressure, ratio of argon to oxygen and substrate temperature. The crystalline structure of the films was investigated using X-ray diffraction and scanning electron microscopy. It was demonstrated that the highly oriented (002) films were obtained under a total chamber pressure of 1.33 Pa, containing 40% oxygen and 60% argon and a substrate temperature around 120°C.

Original languageEnglish
Pages (from-to)2424-2430
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume22
Issue number6
DOIs
Publication statusPublished - 2004 Nov

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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