Study on (Ba,Ca)(Ti,Zr)O3 dielectric cofired with copper electrode

Shih Hao Wang, Yin Lai Tsai, Wen-Shi Lee

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3 Citations (Scopus)

Abstract

In this study, the sintering temperature of a (Ba,Ca)(Ti,Zr)O3 (BCTZ) dielectric for cofiring with a Cu inner electrode is determined to be lower than 1050 °C in a reducing atmosphere (N2/H2 = 95/5) by using the sintering aids SiO2 and Li2CO 3. The contents of SiO2 and Li2CO3 are studied to achieve optimum dielectric characteristics and microstructure. The BCTZ dielectric with 0.25 wt% SiO2 and Li2CO 3 fired with a Cu electrode at 1050 °C for 2 h in a reducing atmosphere shows promising properties, such as a dielectric constant of up to 9500, a low dielectric loss of 23 × 10-4,and a high insulation resistance of up to 1.2 × 1012Ω. However, the excess amount of Li2CO3 results from the formation of the secondary phase. Ithas been determined that the secondary phase is (Ba 1.55Ca0.45SiO4) by high-resolution transmission electron microscopy and energy-dispersive spectrometry (HRTEM-EDS). The presence of the secondary phase is harmful to the properties of the BCTZ dielectric including dielectric constant, insulation resistance, and degree of dielectric loss. The interdiffusion of the dielectric-electrode interface is observed in the backscattered electron imaging (BEI) and line scan modes. The result indicates that such interdiffusion is easier from the electrode to the dielectric layer than from the dielectric layer to the electrode.

Original languageEnglish
Article number061501
JournalJapanese Journal of Applied Physics
Volume53
Issue number6
DOIs
Publication statusPublished - 2014 Jan 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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