Study the passivation characteristics of microwave annealing applied to APALD deposited Al2O3 thin film

Yu Chun Huang, Ricky Wenkuei Chuang, Keh Moh Lin, Tsung Chieh Wu

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds