Surface acoustic wave device properties of (B, Al)N films on 128° Y-X LiNbO 3 substrate

Jen Hao Song, Jow Lay Huang, Sean Wu, Sheng Chang Wang, Jian Long Ruan, Ding Fwu Lii

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A c-axis orientated aluminium nitride (AlN) film on a 128° Y-X lithium niobate (LiNbO 3 ) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient (k 2 ) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis orientated (B, Al)N film (with 2.6 at.% boron) was deposited on a 128° Y-X LiNbO 3 substrate by a co-sputtering system to further boost SAW device properties. The XRD and TEM results show that the (B, Al)N films show highly aligned columns with the c-axis perpendicular to the substrate. The hardness and Young's modulus of (B, Al)N film on 128° Y-X LiNbO 3 substrates are at least 17% and 7% larger than AlN films, respectively. From the SAW device measurement, the operation frequency characteristic of (B, Al)N film on 128° Y-X LiNbO 3 is higher than pure AlN on it. The SAW velocity also increases as (B, Al)N film thickness increases (at fixed IDT wavelength). Furthermore, the k 2 of (B, Al)N on the IDT/128° Y-X LiNbO 3 SAW device shows a higher value than AlN on it.

Original languageEnglish
Pages (from-to)7156-7159
Number of pages4
JournalApplied Surface Science
Volume256
Issue number23
DOIs
Publication statusPublished - 2010 Sept 15

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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