Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication

Han-Yu Lin, Jie-Yao Yang, Szu-Han Yu, Chih-Yin Liu, Tzuu-Hseng S. Li

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2019 International Conference on Advanced Technology Innovation (ICATI 2019)
Place of Publication	Sapporo, Hokkaido, Japan
Publication status	Published - 2019 Jul

Cite this

@inproceedings{f88cc412859e4a56bf506d8cb6c23c73,

title = "Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication",

author = "Han-Yu Lin and Jie-Yao Yang and Szu-Han Yu and Chih-Yin Liu and Li, {Tzuu-Hseng S.}",

year = "2019",

month = jul,

language = "English",

booktitle = "2019 International Conference on Advanced Technology Innovation (ICATI 2019)",

}