Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication

Han-Yu Lin, Jie-Yao Yang, Szu-Han Yu, Chih-Yin Liu, Tzuu-Hseng S. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2019 International Conference on Advanced Technology Innovation (ICATI 2019)
Place of PublicationSapporo, Hokkaido, Japan
Publication statusPublished - 2019 Jul

Cite this

Lin, H-Y., Yang, J-Y., Yu, S-H., Liu, C-Y., & Li, T-H. S. (2019). Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. In 2019 International Conference on Advanced Technology Innovation (ICATI 2019) Sapporo, Hokkaido, Japan.
Lin, Han-Yu ; Yang, Jie-Yao ; Yu, Szu-Han ; Liu, Chih-Yin ; Li, Tzuu-Hseng S. / Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. 2019 International Conference on Advanced Technology Innovation (ICATI 2019). Sapporo, Hokkaido, Japan, 2019.
@inproceedings{f88cc412859e4a56bf506d8cb6c23c73,
title = "Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication",
author = "Han-Yu Lin and Jie-Yao Yang and Szu-Han Yu and Chih-Yin Liu and Li, {Tzuu-Hseng S.}",
year = "2019",
month = "7",
language = "English",
booktitle = "2019 International Conference on Advanced Technology Innovation (ICATI 2019)",

}

Lin, H-Y, Yang, J-Y, Yu, S-H, Liu, C-Y & Li, T-HS 2019, Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. in 2019 International Conference on Advanced Technology Innovation (ICATI 2019). Sapporo, Hokkaido, Japan.

Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. / Lin, Han-Yu; Yang, Jie-Yao; Yu, Szu-Han; Liu, Chih-Yin; Li, Tzuu-Hseng S.

2019 International Conference on Advanced Technology Innovation (ICATI 2019). Sapporo, Hokkaido, Japan, 2019.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication

AU - Lin, Han-Yu

AU - Yang, Jie-Yao

AU - Yu, Szu-Han

AU - Liu, Chih-Yin

AU - Li, Tzuu-Hseng S.

PY - 2019/7

Y1 - 2019/7

M3 - Conference contribution

BT - 2019 International Conference on Advanced Technology Innovation (ICATI 2019)

CY - Sapporo, Hokkaido, Japan

ER -

Lin H-Y, Yang J-Y, Yu S-H, Liu C-Y, Li T-HS. Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. In 2019 International Conference on Advanced Technology Innovation (ICATI 2019). Sapporo, Hokkaido, Japan. 2019