Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication

Han-Yu Lin, Jie-Yao Yang, Szu-Han Yu, Chih-Yin Liu, Tzuu-Hseng S. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2019 International Conference on Advanced Technology Innovation (ICATI 2019)
Place of PublicationSapporo, Hokkaido, Japan
Publication statusPublished - 2019 Jul

Cite this

Lin, H-Y., Yang, J-Y., Yu, S-H., Liu, C-Y., & Li, T-H. S. (2019). Surface Defect Inspection by a Fine-tuned YOLO Method for Wafer Fabrication. In 2019 International Conference on Advanced Technology Innovation (ICATI 2019)