This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Publication status||Published - 2005 Sep 5|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)