Surface-micromachined optical interferometry system utilizing three-dimensional micromirrors and microgratings

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.

Original languageEnglish
Pages (from-to)L668-L671
JournalJapanese Journal of Applied Physics
Issue number20-23
Publication statusPublished - 2005

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy


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