Carbon molecular sieve (CMS) membranes for separating gases were deposited on porous Al2O3 disks using CH3COCH 3+CH4, by a remote inductively coupled-plasma (ICP) chemical vapor deposition (CVD). The new method for preparing membranes with a high H2/N2 selectivity without any reduction of the permeance was introduced by combining the surface treatment with high-energy ion bombardment and subsequent high-temperature pyrolysis study. The H 2/N2 selectivity reached 50 with an extremely high permeance of approximately 1.6×10-6 mol m-2 s -1 Pa-1 at 423 K. The O2/N2 selectivity reached 2.5 and the O2 permeance was approximately 2×10-7 mol m-2 s-1 Pa-1 at 398 K. Short and optimized surface treatment periods were required to ensure high efficiency. Without pyrolysis, surface treatments alone markedly reduced the H2 and N2 permeances but did not affect selectivity. Besides, without any surface treatment, pyrolysis alone markedly increased the H2 and N2 permeances, but did not improve selectivity, because the desorption of carbon left large pores. Surface treatment must be combined with pyrolysis to enhance simultaneously the permeance and selectivity of CMS membranes, in a manner very different from that associated with conventional pore-plugging mechanism in typical CVD.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces, Coatings and Films