Surface warpage measurement of diamond grid disk by shadow Moiré method

Terry Yuan Fang Chen, Jian Shiang Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface warpage of diamond grid disks. To eliminate erroneous bright or black spots caused by the diamond grids, a novel method is proposed by selecting proper threshold values from the addition of four phase-shifted images, and from the grey-level difference between the addition of phases 0 and π images and the addition of phases π/2 and 3π/2 images. Test of the proposed method on real specimens show that the erroneous bright and black spots can be effectively identified and patched. Thereafter the phase can be unwrapped successfully to obtain the surface profile and thus the warpage of specimens.

Original languageEnglish
Title of host publicationSeventh International Symposium on Precision Engineering Measurements and Instrumentation
DOIs
Publication statusPublished - 2011 Dec 1
Event7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
Duration: 2011 Aug 72011 Aug 11

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8321
ISSN (Print)0277-786X

Other

Other7th International Symposium on Precision Engineering Measurements and Instrumentation
CountryChina
CityLijiang
Period11-08-0711-08-11

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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