Synthesis and characterization of combinatorial libraries of semiconductor gas sensors

M. A. Aronova, Kao-Shuo Chang, I. Takeuchi, H. Jabs, D. Westerheim, A. Gonzalez-Martin, J. Kim, B. Lewis

Research output: Contribution to journalConference article

Abstract

We have fabricated thin-film combinatorial gas sensor libraries based on doped semiconducting SnO 2 thin films. The utility of combinatorial libraries is two-fold: one is to search and optimize the compositions for high sensitivity and selectivity of gases, and the other is to make use of the natural array geometry of the libraries with different sensor elements for electronic noses. Combinatorial pulsed-laser ablation was used to deposit compositionally varying arrays of sensor elements onto a pre-patterned device electrode configuration. Using a multiplexing electronics, we have demonstrated detection of chloroform, formaldehyde, and benzene gases at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

Original languageEnglish
Pages (from-to)233-239
Number of pages7
JournalMaterials Research Society Symposium - Proceedings
Volume804
Publication statusPublished - 2003 Dec 1
EventCombinatorial and Artificial Intelligence Methods in Materials Science II - Boston, MA., United States
Duration: 2003 Dec 12003 Dec 4

Fingerprint

Chemical sensors
Semiconductor materials
sensors
Sensors
synthesis
Gases
gases
Thin films
Laser ablation
Chloroform
Chlorine compounds
Benzene
Pulsed lasers
Multiplexing
Formaldehyde
Pattern recognition
Electronic equipment
Deposits
thin films
formaldehyde

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Aronova, M. A., Chang, K-S., Takeuchi, I., Jabs, H., Westerheim, D., Gonzalez-Martin, A., ... Lewis, B. (2003). Synthesis and characterization of combinatorial libraries of semiconductor gas sensors. Materials Research Society Symposium - Proceedings, 804, 233-239.
Aronova, M. A. ; Chang, Kao-Shuo ; Takeuchi, I. ; Jabs, H. ; Westerheim, D. ; Gonzalez-Martin, A. ; Kim, J. ; Lewis, B. / Synthesis and characterization of combinatorial libraries of semiconductor gas sensors. In: Materials Research Society Symposium - Proceedings. 2003 ; Vol. 804. pp. 233-239.
@article{d704baff78d1473a875b65a74679663e,
title = "Synthesis and characterization of combinatorial libraries of semiconductor gas sensors",
abstract = "We have fabricated thin-film combinatorial gas sensor libraries based on doped semiconducting SnO 2 thin films. The utility of combinatorial libraries is two-fold: one is to search and optimize the compositions for high sensitivity and selectivity of gases, and the other is to make use of the natural array geometry of the libraries with different sensor elements for electronic noses. Combinatorial pulsed-laser ablation was used to deposit compositionally varying arrays of sensor elements onto a pre-patterned device electrode configuration. Using a multiplexing electronics, we have demonstrated detection of chloroform, formaldehyde, and benzene gases at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.",
author = "Aronova, {M. A.} and Kao-Shuo Chang and I. Takeuchi and H. Jabs and D. Westerheim and A. Gonzalez-Martin and J. Kim and B. Lewis",
year = "2003",
month = "12",
day = "1",
language = "English",
volume = "804",
pages = "233--239",
journal = "Materials Research Society Symposium - Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

Aronova, MA, Chang, K-S, Takeuchi, I, Jabs, H, Westerheim, D, Gonzalez-Martin, A, Kim, J & Lewis, B 2003, 'Synthesis and characterization of combinatorial libraries of semiconductor gas sensors', Materials Research Society Symposium - Proceedings, vol. 804, pp. 233-239.

Synthesis and characterization of combinatorial libraries of semiconductor gas sensors. / Aronova, M. A.; Chang, Kao-Shuo; Takeuchi, I.; Jabs, H.; Westerheim, D.; Gonzalez-Martin, A.; Kim, J.; Lewis, B.

In: Materials Research Society Symposium - Proceedings, Vol. 804, 01.12.2003, p. 233-239.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Synthesis and characterization of combinatorial libraries of semiconductor gas sensors

AU - Aronova, M. A.

AU - Chang, Kao-Shuo

AU - Takeuchi, I.

AU - Jabs, H.

AU - Westerheim, D.

AU - Gonzalez-Martin, A.

AU - Kim, J.

AU - Lewis, B.

PY - 2003/12/1

Y1 - 2003/12/1

N2 - We have fabricated thin-film combinatorial gas sensor libraries based on doped semiconducting SnO 2 thin films. The utility of combinatorial libraries is two-fold: one is to search and optimize the compositions for high sensitivity and selectivity of gases, and the other is to make use of the natural array geometry of the libraries with different sensor elements for electronic noses. Combinatorial pulsed-laser ablation was used to deposit compositionally varying arrays of sensor elements onto a pre-patterned device electrode configuration. Using a multiplexing electronics, we have demonstrated detection of chloroform, formaldehyde, and benzene gases at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

AB - We have fabricated thin-film combinatorial gas sensor libraries based on doped semiconducting SnO 2 thin films. The utility of combinatorial libraries is two-fold: one is to search and optimize the compositions for high sensitivity and selectivity of gases, and the other is to make use of the natural array geometry of the libraries with different sensor elements for electronic noses. Combinatorial pulsed-laser ablation was used to deposit compositionally varying arrays of sensor elements onto a pre-patterned device electrode configuration. Using a multiplexing electronics, we have demonstrated detection of chloroform, formaldehyde, and benzene gases at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

UR - http://www.scopus.com/inward/record.url?scp=2442417467&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2442417467&partnerID=8YFLogxK

M3 - Conference article

VL - 804

SP - 233

EP - 239

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -

Aronova MA, Chang K-S, Takeuchi I, Jabs H, Westerheim D, Gonzalez-Martin A et al. Synthesis and characterization of combinatorial libraries of semiconductor gas sensors. Materials Research Society Symposium - Proceedings. 2003 Dec 1;804:233-239.