Synthesis of In2O3 Nanowires and Their Gas Sensing Properties

Sin Hui Wang, Shoou-Jinn Chang, Shin Liu, Tsung Ying Tsai, Cheng Liang Hsu

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

This paper presents the synthesis of In2O3 nanowires (NWs) through the vapor-liquid-solid growth mechanism and the fabrication of an In2O3 NW ethanol gas sensor. It was found that the 1-D In2O3 NWs could only be grown at temperatures higher than 850 °C. It was also found that the average length increased while the average diameter decreased as the growth temperature increased. For the fabricated gas sensors, the response (Ra/Rg) was 1.84, 3.78, and 13.97 for the samples thermally treated at 900 °C, 950 °C, and 1000 °C, respectively, at the operating temperatures of 300 °C with 100 ppm ethanol. Disregard the sensitivity, the In2O3 nanowires could be measured at 25 °C to 300 °C. Furthermore, it was found that the fabricated device was much more sensitive to ethanol gas, compared with methanol and acetone gases.

Original languageEnglish
Article number7485843
Pages (from-to)5850-5855
Number of pages6
JournalIEEE Sensors Journal
Volume16
Issue number15
DOIs
Publication statusPublished - 2016 Aug 1

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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