TY - JOUR
T1 - Synthesis of In2O3 Nanowires and Their Gas Sensing Properties
AU - Wang, Sin Hui
AU - Chang, Shoou Jinn
AU - Liu, Shin
AU - Tsai, Tsung Ying
AU - Hsu, Cheng Liang
N1 - Funding Information:
This work was supported in part by the Advanced Optoelectronic Technology Center NCKU under projects from the Ministry of Education, and in part by the Bureau of Energy NCKU under projects from the Ministry of Education, Ministry of Economic Affairs of Taiwan under Contract 103-D0204-6.
Publisher Copyright:
© 2016 IEEE.
PY - 2016/8/1
Y1 - 2016/8/1
N2 - This paper presents the synthesis of In2O3 nanowires (NWs) through the vapor-liquid-solid growth mechanism and the fabrication of an In2O3 NW ethanol gas sensor. It was found that the 1-D In2O3 NWs could only be grown at temperatures higher than 850 °C. It was also found that the average length increased while the average diameter decreased as the growth temperature increased. For the fabricated gas sensors, the response (Ra/Rg) was 1.84, 3.78, and 13.97 for the samples thermally treated at 900 °C, 950 °C, and 1000 °C, respectively, at the operating temperatures of 300 °C with 100 ppm ethanol. Disregard the sensitivity, the In2O3 nanowires could be measured at 25 °C to 300 °C. Furthermore, it was found that the fabricated device was much more sensitive to ethanol gas, compared with methanol and acetone gases.
AB - This paper presents the synthesis of In2O3 nanowires (NWs) through the vapor-liquid-solid growth mechanism and the fabrication of an In2O3 NW ethanol gas sensor. It was found that the 1-D In2O3 NWs could only be grown at temperatures higher than 850 °C. It was also found that the average length increased while the average diameter decreased as the growth temperature increased. For the fabricated gas sensors, the response (Ra/Rg) was 1.84, 3.78, and 13.97 for the samples thermally treated at 900 °C, 950 °C, and 1000 °C, respectively, at the operating temperatures of 300 °C with 100 ppm ethanol. Disregard the sensitivity, the In2O3 nanowires could be measured at 25 °C to 300 °C. Furthermore, it was found that the fabricated device was much more sensitive to ethanol gas, compared with methanol and acetone gases.
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U2 - 10.1109/JSEN.2016.2577023
DO - 10.1109/JSEN.2016.2577023
M3 - Article
AN - SCOPUS:84978215462
SN - 1530-437X
VL - 16
SP - 5850
EP - 5855
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 15
M1 - 7485843
ER -