System and method for automatic virtual metrology

Fan-Tien Cheng (Inventor)

Research output: Patent

Abstract

全自動化型虛擬量測的伺服器與系統及方法
Original languageEnglish
Patent number特許4914457
Publication statusPublished - 2009 Jan 27

Cite this

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title = "System and method for automatic virtual metrology",
abstract = "全自動化型虛擬量測的伺服器與系統及方法",
author = "Fan-Tien Cheng",
year = "2009",
month = "1",
day = "27",
language = "English",
type = "Patent",
note = "特許4914457",

}

System and method for automatic virtual metrology. / Cheng, Fan-Tien (Inventor).

Patent No.: 特許4914457.

Research output: Patent

TY - PAT

T1 - System and method for automatic virtual metrology

AU - Cheng, Fan-Tien

PY - 2009/1/27

Y1 - 2009/1/27

N2 - 全自動化型虛擬量測的伺服器與系統及方法

AB - 全自動化型虛擬量測的伺服器與系統及方法

M3 - Patent

M1 - 特許4914457

ER -

Cheng F-T, inventor. System and method for automatic virtual metrology. 特許4914457. 2009 Jan 27.