Abstract
A server, a system and a method for automatic virtual metrology (AVM) are disclosed. The AVM system comprises a model-creation server and a plurality of AVM servers. The model-creation server is used to construct the first set of virtual metrology (VM) models (of a certain equipment type) including a VM conjecture model, a RI (Reliance Index) model, a GSI (Global Similarity Index) model, a DQI.sub.x (Process Data Quality Index) model, and a DQI.sub.y (Metrology Data Quality Index) model. In the AVM method, the model-creation server also can fan out or port the first set of VM models generated to other AVM servers of the same process apparatus (equipment) type, and each individual fan-out-acceptor's AVM server can perform automatic
| Translated title of the contribution | 全自動化型虛擬量測的伺服器與系統及方法 |
|---|---|
| Original language | English |
| Patent number | 8095484 |
| Publication status | Published - 2009 Nov 26 |