System and method for automatic virtual metrology

Fan-Tien Cheng (Inventor)

Research output: Patent

Abstract

A system and a method for automatic virtual metrology (AVM) are disclosed. The AVM system comprises a model-creation server and a plurality of AVM servers. The model-creation server is used to construct the first set of virtual metrology (VM) models (of a certain equipment type) including a VM conjecture model, a RI (Reliance Index) model, a GSI (Global Similarity Index) model, a DQIX (Process Data Quality Index) model, and a DQIy (Metrology Data Quality Index) model. In the AVM method, the model-creation server also can fan out or port the first set of VM models generated to other AVM servers of the same process apparatus (equipment) type, and each individual fan-out-acceptor’s AVM server can perform automatic model refreshing processes so as to gain and maintain its VM models’ accuracy.
Translated title of the contribution全自動化型虛擬量測的伺服器與系統及方法
Original languageEnglish
Patent number10-1098037
Publication statusPublished - 2009 Jul 30

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