Technology of micromatrix posts applied to elimination of initial filling and Newton ring in a microcapillary pumped loop

Tzong Shyng Leu, Chin Tsan Wang, Jui Ming Yo, Yao Cheng Lee

Research output: Contribution to journalArticlepeer-review

Abstract

A microcapillary pumped loop utilizing a two-phase heat transport has been investigated extensively because of its high heat transmission ability. Although the MCPL has been started up successfully, the initial amount of working liquid required to fill the system is so hard to control that the repeat operation of MCPL is not easy to initiate. In addition, the issue of Newton ring often occurs in the thermal bonding process of the chip and even causes the device to crack. An innovative method of micromatrix posts is proposed and confirmed by experiment for eliminating the initial filling and Newton's ring effectively. This proposed method will be useful in the operation of MCPL and all thermal bonding of microchips.

Original languageEnglish
Article number033007
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume12
Issue number3
DOIs
Publication statusPublished - 2013 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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