Temperature-insensitive fiber pressure sensor based on fabry-pérot interferometry

Chih Wei Lai, Yu-Lung Lo, Jiahn Piring Yur

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the fiber pressure sensor with temperature-insensitive based on the principle of Fabry-Pérot interferometry. The design and fabrication of the sensor are based on MEMS technique and only needs a few of simple procedures. The pressure sensing membrane consists of a base polyimide layer, a metal reflective layer, and a SU-8 layer covered on the metal layer. Also, the fiber end facet is coated another SU-8 layer for temperature compensation. The analysis on the thicknesses of temperature compensator and pressure membrane is analyzed by FEM model. This pressure sensor exhibits an approximately linear response to applied pressure ranging from 0 to 60 kPa under the temperature difference about 100°C The simple fabrication, small size, linear response, and temperature-insensitive make the sensor suitable for many industrial applications.

Original languageEnglish
Title of host publicationSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Pages1331-1336
Number of pages6
Publication statusPublished - 2009 Dec 1
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 - Albuquerque, NM, United States
Duration: 2009 Jun 12009 Jun 4

Publication series

NameSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Volume2

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
CountryUnited States
CityAlbuquerque, NM
Period09-06-0109-06-04

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All Science Journal Classification (ASJC) codes

  • Computational Mechanics

Cite this

Lai, C. W., Lo, Y-L., & Yur, J. P. (2009). Temperature-insensitive fiber pressure sensor based on fabry-pérot interferometry. In Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 (pp. 1331-1336). (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; Vol. 2).