The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer

Shao Yu Chiu, Ying Lang Wang, Chuan Pu Liu, Jin Kun Lan, Chyung Ay, Ming Shiann Feng, Ming Shih Tsai, Bau Tong Dai

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20 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds