The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools

Chien Hung Liu, Wen Yuh Jywe, I. Ching Chen, Li Lii Duan, Hsin Hung Jwo, Yeau Ren Jeng, Tung Hui Hsu, Yun Feng Teng, Hsueh Liang Huang, Ming Shi Wang, Gerd Jäger

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straight- ness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments.

Original languageEnglish
Pages (from-to)245-247
Number of pages3
JournalTechnisches Messen
Volume76
Issue number5
DOIs
Publication statusPublished - 2009 May

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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