The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools

Chien Hung Liu, Wen Yuh Jywe, I. Ching Chen, Li Lii Duan, Hsin Hung Jwo, Yeau-Ren Jeng, Tung Hui Hsu, Yun Feng Teng, Hsueh Liang Huang, Ming-Shi Wang, Gerd Jäger

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straight- ness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments.

Original languageEnglish
Pages (from-to)245-247
Number of pages3
JournalTechnisches Messen
Volume76
Issue number5
DOIs
Publication statusPublished - 2009 May 1

Fingerprint

machine tools
Machine tools
Interferometers
Laser beams
interferometers
Calibration
laser beams
positioning
modules
Angle measurement
yaw
Experiments

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Liu, Chien Hung ; Jywe, Wen Yuh ; Chen, I. Ching ; Duan, Li Lii ; Jwo, Hsin Hung ; Jeng, Yeau-Ren ; Hsu, Tung Hui ; Teng, Yun Feng ; Huang, Hsueh Liang ; Wang, Ming-Shi ; Jäger, Gerd. / The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools. In: Technisches Messen. 2009 ; Vol. 76, No. 5. pp. 245-247.
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abstract = "In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straight- ness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments.",
author = "Liu, {Chien Hung} and Jywe, {Wen Yuh} and Chen, {I. Ching} and Duan, {Li Lii} and Jwo, {Hsin Hung} and Yeau-Ren Jeng and Hsu, {Tung Hui} and Teng, {Yun Feng} and Huang, {Hsueh Liang} and Ming-Shi Wang and Gerd J{\"a}ger",
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Liu, CH, Jywe, WY, Chen, IC, Duan, LL, Jwo, HH, Jeng, Y-R, Hsu, TH, Teng, YF, Huang, HL, Wang, M-S & Jäger, G 2009, 'The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools', Technisches Messen, vol. 76, no. 5, pp. 245-247. https://doi.org/10.1524/teme.2009.0963

The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools. / Liu, Chien Hung; Jywe, Wen Yuh; Chen, I. Ching; Duan, Li Lii; Jwo, Hsin Hung; Jeng, Yeau-Ren; Hsu, Tung Hui; Teng, Yun Feng; Huang, Hsueh Liang; Wang, Ming-Shi; Jäger, Gerd.

In: Technisches Messen, Vol. 76, No. 5, 01.05.2009, p. 245-247.

Research output: Contribution to journalArticle

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AU - Jäger, Gerd

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