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The chemical states and atomic structure evolution of ultralow-energy high-dose Boron implanted Si(110) via laser annealing
Fu Ying Lee, Zong Zhe Wu, Li Chi Kao, Feng Mei Chang, Sheng Wen Chen, Shiu Ko Jangjian, Hui Yu Cheng, Wei Liang Chen, Yu Ming Chang, Kuang Yao Lo
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)