TY - JOUR
T1 - The deposition and wear properties of cathodic arc plasma deposition TiAlN deposits
AU - Lin, Kwang Lung
AU - Hwang, Ming Yeong
AU - Wu, Cheng Dau
N1 - Funding Information:
The authors thank the Metal Industry Research and Development Center for financial support and assistance in this work.
PY - 1996/7/1
Y1 - 1996/7/1
N2 - TiAlN coatings on tool steel were produced with a cathodic arc plasma deposition system. The Taguchi experimental design was applied to achieve the optimum wear-resistant coating. Substrate bias, nitrogen partial pressure and target composition were found to be among the most influential variables that govern the wear resistance of the coatings. The coating properties investigated in the present work include the surface roughness, scanning electron microscope (SEM) surface micrographs, X-ray diffraction (XRD) phase identification, coating microstructure, coating compositions, wear surface micrographs and elemental analysis. The microstructure, microhardness, coating Ti content and residence of wearing debris were found to significantly affect the wear resistance of the coatings.
AB - TiAlN coatings on tool steel were produced with a cathodic arc plasma deposition system. The Taguchi experimental design was applied to achieve the optimum wear-resistant coating. Substrate bias, nitrogen partial pressure and target composition were found to be among the most influential variables that govern the wear resistance of the coatings. The coating properties investigated in the present work include the surface roughness, scanning electron microscope (SEM) surface micrographs, X-ray diffraction (XRD) phase identification, coating microstructure, coating compositions, wear surface micrographs and elemental analysis. The microstructure, microhardness, coating Ti content and residence of wearing debris were found to significantly affect the wear resistance of the coatings.
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U2 - 10.1016/0254-0584(96)80134-9
DO - 10.1016/0254-0584(96)80134-9
M3 - Article
AN - SCOPUS:0030265118
SN - 0254-0584
VL - 46
SP - 77
EP - 83
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
IS - 1
ER -