The deposition and wear properties of cathodic arc plasma deposition TiAlN deposits

Kwang Lung Lin, Ming Yeong Hwang, Cheng Dau Wu

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)

Abstract

TiAlN coatings on tool steel were produced with a cathodic arc plasma deposition system. The Taguchi experimental design was applied to achieve the optimum wear-resistant coating. Substrate bias, nitrogen partial pressure and target composition were found to be among the most influential variables that govern the wear resistance of the coatings. The coating properties investigated in the present work include the surface roughness, scanning electron microscope (SEM) surface micrographs, X-ray diffraction (XRD) phase identification, coating microstructure, coating compositions, wear surface micrographs and elemental analysis. The microstructure, microhardness, coating Ti content and residence of wearing debris were found to significantly affect the wear resistance of the coatings.

Original languageEnglish
Pages (from-to)77-83
Number of pages7
JournalMaterials Chemistry and Physics
Volume46
Issue number1
DOIs
Publication statusPublished - 1996 Jul 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

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