The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas

W. H. Kao, Yean-Liang Su, J. H. Horng, H. C. Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.

Original languageEnglish
Title of host publicationTribology Engineering
EditorsJeng-Haur Horng, Chin-Chung Wei, Yunn-Lin Hwang
PublisherTrans Tech Publications Ltd
Pages135-140
Number of pages6
ISBN (Electronic)9783038354581
DOIs
Publication statusPublished - 2015 Jan 1
EventInternational Conference on Engineering Tribology Technology, ICETT 2014 - Nantou, Taiwan
Duration: 2014 Nov 212014 Nov 23

Publication series

NameKey Engineering Materials
Volume642
ISSN (Print)1013-9826

Other

OtherInternational Conference on Engineering Tribology Technology, ICETT 2014
CountryTaiwan
CityNantou
Period14-11-2114-11-23

Fingerprint

Tungsten
Deposition rates
Gases
Hardness
Coatings
Steel
Wear of materials
Friction
Acetylene
Graphite
Methane
Titanium
Magnetron sputtering
Ionization
Metals
Substrates

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Kao, W. H., Su, Y-L., Horng, J. H., & Huang, H. C. (2015). The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. In J-H. Horng, C-C. Wei, & Y-L. Hwang (Eds.), Tribology Engineering (pp. 135-140). (Key Engineering Materials; Vol. 642). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.642.135
Kao, W. H. ; Su, Yean-Liang ; Horng, J. H. ; Huang, H. C. / The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. Tribology Engineering. editor / Jeng-Haur Horng ; Chin-Chung Wei ; Yunn-Lin Hwang. Trans Tech Publications Ltd, 2015. pp. 135-140 (Key Engineering Materials).
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Kao, WH, Su, Y-L, Horng, JH & Huang, HC 2015, The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. in J-H Horng, C-C Wei & Y-L Hwang (eds), Tribology Engineering. Key Engineering Materials, vol. 642, Trans Tech Publications Ltd, pp. 135-140, International Conference on Engineering Tribology Technology, ICETT 2014, Nantou, Taiwan, 14-11-21. https://doi.org/10.4028/www.scientific.net/KEM.642.135

The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. / Kao, W. H.; Su, Yean-Liang; Horng, J. H.; Huang, H. C.

Tribology Engineering. ed. / Jeng-Haur Horng; Chin-Chung Wei; Yunn-Lin Hwang. Trans Tech Publications Ltd, 2015. p. 135-140 (Key Engineering Materials; Vol. 642).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.

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Kao WH, Su Y-L, Horng JH, Huang HC. The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas. In Horng J-H, Wei C-C, Hwang Y-L, editors, Tribology Engineering. Trans Tech Publications Ltd. 2015. p. 135-140. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.642.135