TY - GEN
T1 - The deposition rate, hardness and tribological properties of a-C:H coatings with a tungsten filament-assisted ionized reaction gas
AU - Kao, W. H.
AU - Su, Y. L.
AU - Horng, J. H.
AU - Huang, H. C.
N1 - Publisher Copyright:
© 2015 Trans Tech Publications, Switzerland.
PY - 2015
Y1 - 2015
N2 - The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.
AB - The a-C:H coatings were deposited on AISI M2 steel disks using an unbalanced magnetron sputtering technique with a single titanium metal target, three graphite targets and mixed methane/ acetylene reactive gas. The various currents (9A-17A) were applied to the tungsten filament to enhance ionization rate of reactive gas. Tribological properties of a-C:H coatings were conducted used reciprocating friction tester. The results show that the tungsten filament current has a significant effect on the deposition rate, hardness and tribological properties of the coatings. With the increase of the tungsten filament current, the deposition rate and hardness of the coating increases, respectively. In sliding against an AISI 52100 steel ball for 24 minutes, all of coatings reduce the wear depth by a factor of at least 11 compared to that observed on an uncoated substrate. The 17A coating yields the best tribological properties that are the minimum wear depth, the lowest friction coefficient and the maximum lifetime when sliding against an AISI 52100 steel ball.
UR - http://www.scopus.com/inward/record.url?scp=84930144894&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/KEM.642.135
DO - 10.4028/www.scientific.net/KEM.642.135
M3 - Conference contribution
AN - SCOPUS:84930144894
T3 - Key Engineering Materials
SP - 135
EP - 140
BT - Tribology Engineering
A2 - Hwang, Yunn-Lin
A2 - Horng, Jeng-Haur
A2 - Wei, Chin-Chung
PB - Trans Tech Publications Ltd
T2 - International Conference on Engineering Tribology Technology, ICETT 2014
Y2 - 21 November 2014 through 23 November 2014
ER -