Abstract
In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.
| Original language | English |
|---|---|
| Pages (from-to) | 71-80 |
| Number of pages | 10 |
| Journal | Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an |
| Volume | 33 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2010 Jan 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
}
The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited). / Chen, Shang-Liang; Jywe, Wen Yuh; Hsieh, Tung Hsien; Liu, Chien Hung; Huang, Hsueh Liang; Hsu, Tung Hui; Jeng, Yeau-Ren; Wang, Ming-Shi.
In: Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, Vol. 33, No. 1, 01.01.2010, p. 71-80.Research output: Contribution to journal › Article
TY - JOUR
T1 - The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)
AU - Chen, Shang-Liang
AU - Jywe, Wen Yuh
AU - Hsieh, Tung Hsien
AU - Liu, Chien Hung
AU - Huang, Hsueh Liang
AU - Hsu, Tung Hui
AU - Jeng, Yeau-Ren
AU - Wang, Ming-Shi
PY - 2010/1/1
Y1 - 2010/1/1
N2 - In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.
AB - In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.
UR - http://www.scopus.com/inward/record.url?scp=76249091523&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=76249091523&partnerID=8YFLogxK
U2 - 10.1080/02533839.2010.9671598
DO - 10.1080/02533839.2010.9671598
M3 - Article
VL - 33
SP - 71
EP - 80
JO - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers
JF - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers
SN - 0253-3839
IS - 1
ER -