The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)

Shang Liang Chen; Wen Yuh Jywe; Tung Hsien Hsieh; Chien Hung Liu; Hsueh Liang Huang; Tung Hui Hsu; Yeau Ren Jeng; Ming Shi Wang

doi:10.1080/02533839.2010.9671598

The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)

Shang Liang Chen, Wen Yuh Jywe, Tung Hsien Hsieh, Chien Hung Liu, Hsueh Liang Huang, Tung Hui Hsu, Yeau Ren Jeng, Ming Shi Wang

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

Original language	English
Pages (from-to)	71-80
Number of pages	10
Journal	Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an
Volume	33
Issue number	1
DOIs	https://doi.org/10.1080/02533839.2010.9671598
Publication status	Published - 2010

All Science Journal Classification (ASJC) codes

Engineering(all)

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Chen, S. L., Jywe, W. Y., Hsieh, T. H., Liu, C. H., Huang, H. L., Hsu, T. H., Jeng, Y. R., & Wang, M. S. (2010). The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited). Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, 33(1), 71-80. https://doi.org/10.1080/02533839.2010.9671598

Chen, Shang Liang ; Jywe, Wen Yuh ; Hsieh, Tung Hsien ; Liu, Chien Hung ; Huang, Hsueh Liang ; Hsu, Tung Hui ; Jeng, Yeau Ren ; Wang, Ming Shi. / The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited). In: Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an. 2010 ; Vol. 33, No. 1. pp. 71-80.

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title = "The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)",

abstract = "In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.",

author = "Chen, {Shang Liang} and Jywe, {Wen Yuh} and Hsieh, {Tung Hsien} and Liu, {Chien Hung} and Huang, {Hsueh Liang} and Hsu, {Tung Hui} and Jeng, {Yeau Ren} and Wang, {Ming Shi}",

note = "Funding Information: The work was fully supported by the National Science Council, Taiwan, Republic of China, ( Grants Number NSC 93-2212-E-150-036 and number NSC 94-2622-E-150-001).",

year = "2010",

doi = "10.1080/02533839.2010.9671598",

language = "English",

volume = "33",

pages = "71--80",

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Chen, SL, Jywe, WY, Hsieh, TH, Liu, CH, Huang, HL, Hsu, TH, Jeng, YR & Wang, MS 2010, 'The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)', Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, vol. 33, no. 1, pp. 71-80. https://doi.org/10.1080/02533839.2010.9671598

The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited). / Chen, Shang Liang; Jywe, Wen Yuh; Hsieh, Tung Hsien; Liu, Chien Hung; Huang, Hsueh Liang; Hsu, Tung Hui; Jeng, Yeau Ren; Wang, Ming Shi.

In: Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, Vol. 33, No. 1, 2010, p. 71-80.

Research output: Contribution to journal › Article › peer-review

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AU - Chen, Shang Liang

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AU - Hsieh, Tung Hsien

AU - Liu, Chien Hung

AU - Huang, Hsueh Liang

AU - Hsu, Tung Hui

AU - Jeng, Yeau Ren

AU - Wang, Ming Shi

N1 - Funding Information: The work was fully supported by the National Science Council, Taiwan, Republic of China, ( Grants Number NSC 93-2212-E-150-036 and number NSC 94-2622-E-150-001).

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N2 - In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

AB - In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

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Chen SL, Jywe WY, Hsieh TH, Liu CH, Huang HL, Hsu TH et al. The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited). Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an. 2010;33(1):71-80. https://doi.org/10.1080/02533839.2010.9671598

The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)

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