The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited)

Shang Liang Chen, Wen Yuh Jywe, Tung Hsien Hsieh, Chien Hung Liu, Hsueh Liang Huang, Tung Hui Hsu, Yeau Ren Jeng, Ming Shi Wang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

Original languageEnglish
Pages (from-to)71-80
Number of pages10
JournalJournal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an
Volume33
Issue number1
DOIs
Publication statusPublished - 2010 Jan 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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