THe Dynamic Response Analysis of a Pyroelectric Thin-Film Infrared Sensor with Thermal Isolation Improvement Structure

Jyh Jier Ho, Y. K. Fang, W. J. Lee, F. Y. Chen, W. T. Hsieh, S. F. Ting, Ming-Shaung Ju, S. B. Huang, Kun Hsien Wu, C. Y. Chen

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Both thoretical and experimental studies of the substrate effect on the thermal behavior of a PbTiO3 infrared (IR) sensor have been reported. With active cantilever dimensions of 200 x 100 x 5 urn3 formed by etching processes, the pyroelectric micro-electro-mechanical system (pyro/MEMS) structure exhibits a much superior performance to that of a traditional IRsensing bulk structure under the 800-juW incident optical light with wavelength of 970 nm. Two-order improvement in current responsivity is obtained for the pyro/MEMS structure. This shows the substrate effect on the performance of a pyro/MEMS IR sensor is very significant. A simple model has also been proposed to illustrate the substrate effect more comprehensively.

Original languageEnglish
Pages (from-to)2289-2294
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume46
Issue number12
DOIs
Publication statusPublished - 1999 Dec 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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