The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes

Wan Yu Wu, F. Y. Teng, Jyh Ming Ting

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We report the positive effect of an Al underlayer for enhancing the growth of carbon nanotubes (CNTs) on Si substrates. The catalyst used for the growth was a sputter-deposited Fe-Si thin film and the growth temperature was 370 °C. The morphology, composition, microstructure, and crystalline structure of the Fe-Si films with and without an Al underlayer having different thicknesses were examined. Correlation between the Al underlayer thickness and the film characteristics is made. The effect of Al thickness on the growth of CNTs is discussed. It was found that the maximum growth increase occurs at an Al thickness of 4 nm, for which the growth is increased by 220%.

Original languageEnglish
Pages (from-to)4589-4594
Number of pages6
JournalCarbon
Volume49
Issue number13
DOIs
Publication statusPublished - 2011 Nov 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

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