The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes

Wan Yu Wu; F. Y. Teng; Jyh Ming Ting

doi:10.1016/j.carbon.2011.06.079

The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes

Wan Yu Wu, F. Y. Teng, Jyh Ming Ting

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4 Citations (Scopus)

Abstract

We report the positive effect of an Al underlayer for enhancing the growth of carbon nanotubes (CNTs) on Si substrates. The catalyst used for the growth was a sputter-deposited Fe-Si thin film and the growth temperature was 370 °C. The morphology, composition, microstructure, and crystalline structure of the Fe-Si films with and without an Al underlayer having different thicknesses were examined. Correlation between the Al underlayer thickness and the film characteristics is made. The effect of Al thickness on the growth of CNTs is discussed. It was found that the maximum growth increase occurs at an Al thickness of 4 nm, for which the growth is increased by 220%.

Original language	English
Pages (from-to)	4589-4594
Number of pages	6
Journal	Carbon
Volume	49
Issue number	13
DOIs	https://doi.org/10.1016/j.carbon.2011.06.079
Publication status	Published - 2011 Nov

All Science Journal Classification (ASJC) codes

Chemistry(all)
Materials Science(all)

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10.1016/j.carbon.2011.06.079

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title = "The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes",

abstract = "We report the positive effect of an Al underlayer for enhancing the growth of carbon nanotubes (CNTs) on Si substrates. The catalyst used for the growth was a sputter-deposited Fe-Si thin film and the growth temperature was 370 °C. The morphology, composition, microstructure, and crystalline structure of the Fe-Si films with and without an Al underlayer having different thicknesses were examined. Correlation between the Al underlayer thickness and the film characteristics is made. The effect of Al thickness on the growth of CNTs is discussed. It was found that the maximum growth increase occurs at an Al thickness of 4 nm, for which the growth is increased by 220%.",

author = "Wu, {Wan Yu} and Teng, {F. Y.} and Ting, {Jyh Ming}",

note = "Funding Information: The work was supported by the National Science Council in Taiwan under Grant No. NSC 95-2221-E-006-198 and the University{\textquoteright}s Project of Promoting Academic Excellence and Developing World Class Research Centers: D96-3300. The work was also supported in part by the National Science Council in Taiwan under Grant No. NSC 99-ET-E-006-004-ET . The authors acknowledge the support from Micro-Nano Technology Research Center at National Cheng Kung University. ",

year = "2011",

month = nov,

doi = "10.1016/j.carbon.2011.06.079",

language = "English",

volume = "49",

pages = "4589--4594",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier Limited",

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T1 - The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes

AU - Wu, Wan Yu

AU - Teng, F. Y.

AU - Ting, Jyh Ming

N1 - Funding Information: The work was supported by the National Science Council in Taiwan under Grant No. NSC 95-2221-E-006-198 and the University’s Project of Promoting Academic Excellence and Developing World Class Research Centers: D96-3300. The work was also supported in part by the National Science Council in Taiwan under Grant No. NSC 99-ET-E-006-004-ET . The authors acknowledge the support from Micro-Nano Technology Research Center at National Cheng Kung University.

PY - 2011/11

Y1 - 2011/11

N2 - We report the positive effect of an Al underlayer for enhancing the growth of carbon nanotubes (CNTs) on Si substrates. The catalyst used for the growth was a sputter-deposited Fe-Si thin film and the growth temperature was 370 °C. The morphology, composition, microstructure, and crystalline structure of the Fe-Si films with and without an Al underlayer having different thicknesses were examined. Correlation between the Al underlayer thickness and the film characteristics is made. The effect of Al thickness on the growth of CNTs is discussed. It was found that the maximum growth increase occurs at an Al thickness of 4 nm, for which the growth is increased by 220%.

AB - We report the positive effect of an Al underlayer for enhancing the growth of carbon nanotubes (CNTs) on Si substrates. The catalyst used for the growth was a sputter-deposited Fe-Si thin film and the growth temperature was 370 °C. The morphology, composition, microstructure, and crystalline structure of the Fe-Si films with and without an Al underlayer having different thicknesses were examined. Correlation between the Al underlayer thickness and the film characteristics is made. The effect of Al thickness on the growth of CNTs is discussed. It was found that the maximum growth increase occurs at an Al thickness of 4 nm, for which the growth is increased by 220%.

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DO - 10.1016/j.carbon.2011.06.079

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JO - Carbon

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The effect of an Al underlayer on Fe-Si thin film catalysts for the improved growth of carbon nanotubes

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