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The effect of annealing temperature on the microstructure of nanoindented Au/Cr/Si thin films
Woei-Shyan Lee, Te Yu Liu
Department of Mechanical Engineering
Research output
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Contribution to journal
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Article
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peer-review
12
Citations (Scopus)
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Engineering & Materials Science
Nanoindentation
100%
Annealing
82%
Thin films
78%
Microstructure
55%
Unloading
51%
Indentation
35%
Temperature
33%
Piles
31%
Plastic deformation
29%
Substrates
23%
Debonding
18%
Eutectics
17%
Atoms
17%
Transmission electron microscopy
16%
Elastic moduli
13%
Scanning electron microscopy
13%
Hardness
13%
Plastics
12%
Recovery
11%
Mechanical properties
10%
Chemical Compounds
Plastic Deformation
68%
Annealing
65%
Microstructure
55%
Strength
35%
Homogenization
31%
Young's Modulus
29%
Eutectics
28%
Liquid Film
26%
Displacement
22%
Transmission Electron Microscopy
18%
Diffusion
17%
Scanning Electron Microscopy
16%