The effect of interface shape on anisotropic thermal stress of bulk single crystal during Czochralski growth

Tei-Chen Chen, Hsiang Chi Wu, Cheng I. Weng

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Both three-dimensional nonlinear anisotropic thermoelastic and two-dimensional nonlinear heat conduction finite element programs, which take into consideration the effects of the shape of the solid-liquid interface, elastic anisotropy and temperature-dependent material properties, were developed and implemented in this article to calculate the distributions of the temperature and the thermal stress in bulk single crystals during Czochralski growth. Thermal stress analyses of a GaAs bulk single crystal were carried out for the general form and, therefore, could be performed in an arbitrary pulling direction. However, only the results in the cases of the 〈00 1〉 and 〈1 1 1〉, which are of practical significance, were studied in this article. The influence of the elastic anisotropy and the shape of the solid-liquid interface, modeled as parabolic, upon the distributions of temperature, stress and the dislocation density parameter were investigated and discussed.

Original languageEnglish
Pages (from-to)367-379
Number of pages13
JournalJournal of Crystal Growth
Volume173
Issue number3-4
DOIs
Publication statusPublished - 1997 Jan 1

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Crystal growth from melt
thermal stresses
Crystal growth
Thermal stress
elastic anisotropy
Single crystals
liquid-solid interfaces
single crystals
Anisotropy
pulling
Liquids
Heat conduction
conductive heat transfer
Temperature
temperature
Materials properties

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

@article{7b35bf41e9a34308adaf9c34841f6549,
title = "The effect of interface shape on anisotropic thermal stress of bulk single crystal during Czochralski growth",
abstract = "Both three-dimensional nonlinear anisotropic thermoelastic and two-dimensional nonlinear heat conduction finite element programs, which take into consideration the effects of the shape of the solid-liquid interface, elastic anisotropy and temperature-dependent material properties, were developed and implemented in this article to calculate the distributions of the temperature and the thermal stress in bulk single crystals during Czochralski growth. Thermal stress analyses of a GaAs bulk single crystal were carried out for the general form and, therefore, could be performed in an arbitrary pulling direction. However, only the results in the cases of the 〈00 1〉 and 〈1 1 1〉, which are of practical significance, were studied in this article. The influence of the elastic anisotropy and the shape of the solid-liquid interface, modeled as parabolic, upon the distributions of temperature, stress and the dislocation density parameter were investigated and discussed.",
author = "Tei-Chen Chen and Wu, {Hsiang Chi} and Weng, {Cheng I.}",
year = "1997",
month = "1",
day = "1",
doi = "10.1016/S0022-0248(96)00894-9",
language = "English",
volume = "173",
pages = "367--379",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "3-4",

}

The effect of interface shape on anisotropic thermal stress of bulk single crystal during Czochralski growth. / Chen, Tei-Chen; Wu, Hsiang Chi; Weng, Cheng I.

In: Journal of Crystal Growth, Vol. 173, No. 3-4, 01.01.1997, p. 367-379.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The effect of interface shape on anisotropic thermal stress of bulk single crystal during Czochralski growth

AU - Chen, Tei-Chen

AU - Wu, Hsiang Chi

AU - Weng, Cheng I.

PY - 1997/1/1

Y1 - 1997/1/1

N2 - Both three-dimensional nonlinear anisotropic thermoelastic and two-dimensional nonlinear heat conduction finite element programs, which take into consideration the effects of the shape of the solid-liquid interface, elastic anisotropy and temperature-dependent material properties, were developed and implemented in this article to calculate the distributions of the temperature and the thermal stress in bulk single crystals during Czochralski growth. Thermal stress analyses of a GaAs bulk single crystal were carried out for the general form and, therefore, could be performed in an arbitrary pulling direction. However, only the results in the cases of the 〈00 1〉 and 〈1 1 1〉, which are of practical significance, were studied in this article. The influence of the elastic anisotropy and the shape of the solid-liquid interface, modeled as parabolic, upon the distributions of temperature, stress and the dislocation density parameter were investigated and discussed.

AB - Both three-dimensional nonlinear anisotropic thermoelastic and two-dimensional nonlinear heat conduction finite element programs, which take into consideration the effects of the shape of the solid-liquid interface, elastic anisotropy and temperature-dependent material properties, were developed and implemented in this article to calculate the distributions of the temperature and the thermal stress in bulk single crystals during Czochralski growth. Thermal stress analyses of a GaAs bulk single crystal were carried out for the general form and, therefore, could be performed in an arbitrary pulling direction. However, only the results in the cases of the 〈00 1〉 and 〈1 1 1〉, which are of practical significance, were studied in this article. The influence of the elastic anisotropy and the shape of the solid-liquid interface, modeled as parabolic, upon the distributions of temperature, stress and the dislocation density parameter were investigated and discussed.

UR - http://www.scopus.com/inward/record.url?scp=0031117321&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031117321&partnerID=8YFLogxK

U2 - 10.1016/S0022-0248(96)00894-9

DO - 10.1016/S0022-0248(96)00894-9

M3 - Article

VL - 173

SP - 367

EP - 379

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 3-4

ER -