The Effect of KrF Laser Annealing on the Au/GeAuNi/Au Contact Resistance of n-Type GaAs Based Light Emitting Diode

Yun Shan Chien; Po Yu Yang; Shui-Jinn Wang; Der Ming Kuo; Pei Ren Wang; Yi Ming Chen; Chung Cheng Huang

The Effect of KrF Laser Annealing on the Au/GeAuNi/Au Contact Resistance of n-Type GaAs Based Light Emitting Diode

Yun Shan Chien, Po Yu Yang, Shui-Jinn Wang, Der Ming Kuo, Pei Ren Wang, Yi Ming Chen, Chung Cheng Huang

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	NANO KOREA Symposium 2011
Place of Publication	Seoul, Korea
Publication status	Published - 2011 Aug 24

Cite this

@inproceedings{1c537022cefb49b3b3ab02d3e2c62346,

title = "The Effect of KrF Laser Annealing on the Au/GeAuNi/Au Contact Resistance of n-Type GaAs Based Light Emitting Diode",

author = "Chien, {Yun Shan} and Yang, {Po Yu} and Shui-Jinn Wang and Kuo, {Der Ming} and Wang, {Pei Ren} and Chen, {Yi Ming} and Huang, {Chung Cheng}",

year = "2011",

month = aug,

day = "24",

language = "English",

booktitle = "NANO KOREA Symposium 2011",

}

TY - GEN

T1 - The Effect of KrF Laser Annealing on the Au/GeAuNi/Au Contact Resistance of n-Type GaAs Based Light Emitting Diode

AU - Chien, Yun Shan

AU - Yang, Po Yu

AU - Wang, Shui-Jinn

AU - Kuo, Der Ming

AU - Wang, Pei Ren

AU - Chen, Yi Ming

AU - Huang, Chung Cheng

PY - 2011/8/24

Y1 - 2011/8/24

M3 - Conference contribution

BT - NANO KOREA Symposium 2011

CY - Seoul, Korea

ER -