The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film

Sheng Wen Chen, Chuan Pu Liu, Shiu Ko JangJian, Ying Lang Wang

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint Dive into the research topics of 'The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy