The effect of post-oxide annealing on H2O2-grown Al2O3, AlGaN/GaN polarization charges and MOS-HEMT performances

Han Yin Liu, Wei Chou Hsu, Ching Sung Lee, Bo Yi Chou, Wen Chia Ou, Yi Hsuan Wang, Wei Fan Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science