The effect of sol-gel composition ratio on phase transformation of titanium dioxide under CO2 laser annealing

S. L. Lin, H. Y. Wang, C. K. Chung, S. F. Chuang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The sol-gel solution was mixed by tetraisopropyl orthotitanate (TTIP), acetonylacetone, distilled water and alcohol at various molar ratios and coated on p-type silicon substructure for titanium oxide formation. Then the CO 2 laser annealing in air at powers of 0.5, 1.5 and 3.0 W in the defocus mode was performed on the coatings for studying crystallization of titanium oxide. The microstructure and phase transformation of titanium dioxide were examined by X-ray diffraction pattern. Increasing TTIP concentration and decreasing laser power were favorable for anatase phase formation. The grain size of titanium dioxide calculated using Scherrer's formula was between 10 and 32 nm, which increased with increasing laser power. The ANSYS simulation was employed to calculate temperature distribution of films to correlate with phase transformation of titanium dioxide. This sol-gel processing combined with CO2 laser annealing had advantages of low cost, controllable titanium dioxide phase, selective area annealing, large area fabrication and easy operating at room temperature.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages1100-1103
Number of pages4
DOIs
Publication statusPublished - 2011 Oct 4
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 2011 Feb 202011 Feb 23

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period11-02-2011-02-23

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Lin, S. L., Wang, H. Y., Chung, C. K., & Chuang, S. F. (2011). The effect of sol-gel composition ratio on phase transformation of titanium dioxide under CO2 laser annealing. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1100-1103). [6017548] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017548