乙炔氣體的流量和鈦金屬的添加對於類鑽碳之機械與磨潤性質的影響

Translated title of the contribution: The Effect of the Acetylene Gas Flow Rate and Doping with Titanium on the Mechanical and Tribological Properties of Diamond-Like Carbon

Yen Liang Su, Jeng Haur Horng, Elena Torskaya, Wen Hsien Kao, Chang Ching Yu

Research output: Contribution to journalArticlepeer-review

Abstract

This study determines the mechanical and tribological properties of Diamond-Like Carbon (DLC), DLC doped titanium (DLC-Ti) and hydrogenated DLC doped titanium (DLC-CH-Ti) coatings. These coatings are deposited on a high-speed steel substrate (SKH51) using Closed Field Unbalanced Magnetron Sputtering (CFUBMS). GDS and EDX analysis shows that when acetylene flow rate is added in deposited chamber, the content of the metallic element (titanium) decreases. The surface morphology for all coatings exhibits a clustered morphology. The XPS analysis at the C1s core level shows that the C-C sp3 ratio increases as that acetylene gas and the titanium content are added. The DLC-CH-Ti coating has the optimal mechanical and tribological properties, with a wear rate of 0.09 (10-6mm3/Nm) and a friction coefficient of 0.11as sliding against an Al2O3 ball. These results are much better than those for the other coatings. The wear rate is 194 times less than that for the substrate alone and the corrosion resistance of the coatings is better than that for the original substrate.

Translated title of the contributionThe Effect of the Acetylene Gas Flow Rate and Doping with Titanium on the Mechanical and Tribological Properties of Diamond-Like Carbon
Original languageChinese (Traditional)
Pages (from-to)11-20
Number of pages10
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume41
Issue number1
Publication statusPublished - 2020 Feb 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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