The effects of chloromethane on diamond nucleation and growth in a hot-filament chemical vapor deposition reactor

Jih Jen Wu, Franklin Chau Nan Hong

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

The effects of chloromethane on diamond nucleation and growth were studied by employing laser reflective interferometry. Chloromethane enhances the film-growth rate only slightly compared to methane. However, chloromethane greatly enhances the nucleation density and shortens the film-forming stage, more significantly at a lower temperature. Thus, chloromethane facilitates the low temperature growth mainly through the enhancement of nucleation. Nucleation density is strongly dependent on the compositions of H atoms and carbon species prior to diamond growth. The residual diamond seeds by diamond-grit scratching are suggested to be the major nucleation sites. Chloromethane can enhance diamond nucleation by protecting the residual seeds from being etched by H atoms.

Original languageEnglish
Pages (from-to)2498-2504
Number of pages7
JournalJournal of Materials Research
Volume13
Issue number9
DOIs
Publication statusPublished - 1998 Sep

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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