The effects of nitrogen flow on reactively sputtered TiAlN films

Bor Yuan Shew; Jow Lay Huang

doi:10.1016/0257-8972(94)02300-F

The effects of nitrogen flow on reactively sputtered TiAlN films

Bor Yuan Shew
, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

65 Citations (Scopus)

Abstract

A thin coating of TiAlN was deposited on a high speed steel cutting tool material by a reactive sputtering process. The effects of N₂ flow rate on the microstructure, chemical composition and mechanical properties of such TiAlN films were investigated. A stoichiometric composition of TiAlN was obtained at a certain critical nitrogen flow rate (^fc_N2). A further increase in N₂ flow led to no detectable changes in chemical composition. A dense, isotropic, fine-grained microstructure was obtained; the optimized hardness, toughness and wear resistance occurred at an N₂ flow rate greater than ^fc_N2. This was probably due to the different kinetics of nitridation of Ti and Al.

Original language	English
Pages (from-to)	30-36
Number of pages	7
Journal	Surface and Coatings Technology
Volume	71
Issue number	1
DOIs	https://doi.org/10.1016/0257-8972(94)02300-F
Publication status	Published - 1995 Feb

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0257-8972(94)02300-F

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@article{11a6f3983a8f4d758887bc9a30b67d26,

title = "The effects of nitrogen flow on reactively sputtered TiAlN films",

abstract = "A thin coating of TiAlN was deposited on a high speed steel cutting tool material by a reactive sputtering process. The effects of N2 flow rate on the microstructure, chemical composition and mechanical properties of such TiAlN films were investigated. A stoichiometric composition of TiAlN was obtained at a certain critical nitrogen flow rate (fcN2). A further increase in N2 flow led to no detectable changes in chemical composition. A dense, isotropic, fine-grained microstructure was obtained; the optimized hardness, toughness and wear resistance occurred at an N2 flow rate greater than fcN2. This was probably due to the different kinetics of nitridation of Ti and Al.",

author = "Shew, \{Bor Yuan\} and Huang, \{Jow Lay\}",

note = "Funding Information: The authors wish to thank the National Science Council of the ROC for its financial support under contractN SC82-0405-E-006-214.",

year = "1995",

month = feb,

doi = "10.1016/0257-8972(94)02300-F",

language = "English",

volume = "71",

pages = "30--36",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier BV",

number = "1",

}

TY - JOUR

T1 - The effects of nitrogen flow on reactively sputtered TiAlN films

AU - Shew, Bor Yuan

AU - Huang, Jow Lay

N1 - Funding Information: The authors wish to thank the National Science Council of the ROC for its financial support under contractN SC82-0405-E-006-214.

PY - 1995/2

Y1 - 1995/2

N2 - A thin coating of TiAlN was deposited on a high speed steel cutting tool material by a reactive sputtering process. The effects of N2 flow rate on the microstructure, chemical composition and mechanical properties of such TiAlN films were investigated. A stoichiometric composition of TiAlN was obtained at a certain critical nitrogen flow rate (fcN2). A further increase in N2 flow led to no detectable changes in chemical composition. A dense, isotropic, fine-grained microstructure was obtained; the optimized hardness, toughness and wear resistance occurred at an N2 flow rate greater than fcN2. This was probably due to the different kinetics of nitridation of Ti and Al.

AB - A thin coating of TiAlN was deposited on a high speed steel cutting tool material by a reactive sputtering process. The effects of N2 flow rate on the microstructure, chemical composition and mechanical properties of such TiAlN films were investigated. A stoichiometric composition of TiAlN was obtained at a certain critical nitrogen flow rate (fcN2). A further increase in N2 flow led to no detectable changes in chemical composition. A dense, isotropic, fine-grained microstructure was obtained; the optimized hardness, toughness and wear resistance occurred at an N2 flow rate greater than fcN2. This was probably due to the different kinetics of nitridation of Ti and Al.

UR - https://www.scopus.com/pages/publications/0029254828

UR - https://www.scopus.com/pages/publications/0029254828#tab=citedBy

U2 - 10.1016/0257-8972(94)02300-F

DO - 10.1016/0257-8972(94)02300-F

M3 - Article

AN - SCOPUS:0029254828

SN - 0257-8972

VL - 71

SP - 30

EP - 36

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1

ER -

The effects of nitrogen flow on reactively sputtered TiAlN films

Abstract

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