The fabrication of PB(ZR,TI)O3 films on a AL/AL 2O3 structure employing a crack amendment process

Bing Huei Chen, Cheng Liang Huang, Long Wu

Research output: Contribution to journalConference articlepeer-review

Abstract

Pb(Zr,Ti)O3 (PZT) thin films with lower gel concentration of 0.2 M to 0.3 M were ceposited on Al/Al2O3 substrate via a sol-gel process, using lead acetate, zirconium npropoxide and titanium isopro-poxide as raw precursors, propyl alcohol as a solvent and acetate acid as a chelating agent and catalyst. After a batch of step (drying, pre-baking), sintered at higher temperature the amorphous PZT thin films were changed to perovskite-type crystal structure. The effect of variables such as gel solutions concentration and heating rate on morphology were investigated to conduct for preparing crack-free PZT thin films. The results showed that the cracking problem is reduced by employing for lower gel concentration 0.2 M with drying at 150°C for 5 min and pre-baking at 350°C for 10 min and then sintering at 700°C for 30 min with heating rate 50°C/min. We also measured P-E hystersis loop using Sawyer-Tower circuit, the values of the remanent polarization (Pr) and coercive field (Ec) are around 11.39 c/cm2 and 84.52 KV/cm, respectively. We also reported on the preparation and performance of a SAW resonator on PZT piezoelectric thin films coated on Al/Al2O3 substrate. Because of existing porous nature, crack-free PZT thin films were further surveyed for satisfactory SAW and FBAR devices on broadband application based on Al/Al2O3 structure.

Original languageEnglish
Pages (from-to)1742-1745
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Volume2
Publication statusPublished - 2003 Dec 1
Event2003 IEEE Ultrasonics Symposium - Proceedings - Honolulu, HI, United States
Duration: 2003 Oct 52003 Oct 8

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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