The formation of diamond-like carbon film at atmospheric pressure by the pulsed laser/plasma hybrid deposition method

Han Pei Wang, Jehnming Lin

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

A pulsed laser/plasma hybrid deposition method has been developed to produce the diamond-like carbon (DLC) film at atmospheric pressure in this work. A plasma torch was used to heat up the carbon particles which were simultaneously ablated by a pulsed laser, thus the kinetic energy of the carbon particle can be increased to form the carbon atoms with amorphous bonding structure of the DLC film by this proposed hybrid deposition method. The influences of the plasma flow have been examined numerically and experimentally. In the numerical analysis, the temperatures of the plasma flow at various inlet pressures and electrode currents have been predicted. According to the experimental results of the carbon film inspected by the Raman spectroscopy, it reveals that the intensity ratio of the D-band to G-band of the carbon film can be reduced to 0.5 by the implementation of plasma flow. Therefore the DLC film was solidly formed. The adhesive strength of the DLC film was also characterized by the scratch test, it can be found that the critical loading of the film is up to 19 N.

Original languageEnglish
Pages (from-to)2246-2250
Number of pages5
JournalSurface and Coatings Technology
Volume204
Issue number14
DOIs
Publication statusPublished - 2010 Apr 15

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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