The formation of diamond-like carbon film at atmospheric pressure by the pulsed laser/plasma hybrid deposition method

Han Pei Wang, Jehnming Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A pulsed laser/plasma hybrid deposition method has been developed to produce the diamond-like carbon (DLC) film at atmospheric pressure in this work. A plasma torch was used to heat up the carbon particles which were simultaneously ablated by a pulsed laser, thus the kinetic energy of the carbon particle can be increased to form the carbon atoms with amorphous bonding structure of the DLC film. The influences of the plasma flow have been examined at various inlet pressures. According to the experimental results of the carbon film inspected by the Raman spectroscopy, it reveals that the intensity ratio of the D-band to G-band of the carbon film can be reduced to 0.5 by the implementation of plasma flow. Therefore the DLC film was solidly formed. The adhesive strength of the DLC film was also characterized by the scratch test, it can be found that the critical loading of the film on the iron substrate is up to 19 N.

Original languageEnglish
Title of host publicationMechanical and Aerospace Engineering
Pages3737-3741
Number of pages5
DOIs
Publication statusPublished - 2012
Event2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011 - Bangkok, Thailand
Duration: 2011 Jul 292011 Jul 31

Publication series

NameApplied Mechanics and Materials
Volume110-116
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011
CountryThailand
CityBangkok
Period11-07-2911-07-31

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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