The influence of illumination positions on UV detection of a ZnO/Si layered SAW oscillator

Ching Liang Wei, Ying Chung Chen, Chih Ming Wang, Po Tsung Hsieh, Po Shu Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An oscillator based on a ZnO/Si layered surface acoustic wave (SAW) device was fabricated for the application of UV detection. An oscillator circuit composed of a high frequency amplifier, a match network and a layered SAW device was constructed, in which ZnO thin film is simultaneously used as an active layer for UV detection and a piezoelectric layer for exciting a high-ordered surface acoustic wave. The microstructure and crystallization of the ZnO films were investigated using the scanning electron microscopy (SEM) and X-ray diffraction (XRD), respectively. The SAW oscillator shows an excellent performance with the resonance frequency of 751 MHz and phase noise of -94.7 dBc@100 kHz. The UV light illuminations were varied with vertical and horizontal positions to analyze the influence on the frequency responses. An extreme frequency shift of 710 kHz under UV intensity of 30 μW/cm2 was obtained at the center of the IDT electrodes.

Original languageEnglish
Title of host publication11th International Conference and Exhibition of the European Ceramic Society 2009
Pages155-159
Number of pages5
Publication statusPublished - 2009 Dec 1
Event11th International Conference and Exhibition of the European Ceramic Society 2009 - Krakow, Poland
Duration: 2009 Jun 212009 Jun 25

Publication series

Name11th International Conference and Exhibition of the European Ceramic Society 2009
Volume1

Other

Other11th International Conference and Exhibition of the European Ceramic Society 2009
CountryPoland
CityKrakow
Period09-06-2109-06-25

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Mechanics of Materials
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

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