The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

Jun Hang Huang; Chuan Pu Liu

doi:10.1016/j.tsf.2005.07.066

The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

Jun Hang Huang, Chuan Pu Liu

Research output: Contribution to journal › Conference article › peer-review

26 Citations (Scopus)

Abstract

Polycrystalline ZnO thin films doped with magnesium or hydrogen were prepared on Corning 7059 glass substrates by RF magnetron co-sputtering or reactive sputtering. The chemistry, morphology, phase evolution and optical properties of the resulting thin films with various deposition parameters were investigated. X-ray photoemission spectroscopy results show that a linear composition variation for Zn_1-xMg_xO with amorphous phase can be obtained by varying sputtering power, which results in increasing optical bandgap linearly with x for better light transmission. However, conductivity drops dramatically as soon as magnesium is introduced. On the other hand, hydrogen doping is demonstrated to enhance both crystallinity and conductivity, which was then degraded upon annealing. However, only being exposed to atmosphere would not change conductivity, implying the characteristics of chemical adsorption of hydrogen in the films. The larger grained morphology of the thin films doped with hydrogen was ascribed to both surface fast diffusion and etching. Both dopants can be applied to improve the properties of zinc oxide films.

Original language	English
Pages (from-to)	152-157
Number of pages	6
Journal	Thin Solid Films
Volume	498
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2005.07.066
Publication status	Published - 2006 Mar 1
Event	Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD - Duration: 2004 Nov 12 → 2004 Nov 14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2005.07.066

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title = "The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films",

abstract = "Polycrystalline ZnO thin films doped with magnesium or hydrogen were prepared on Corning 7059 glass substrates by RF magnetron co-sputtering or reactive sputtering. The chemistry, morphology, phase evolution and optical properties of the resulting thin films with various deposition parameters were investigated. X-ray photoemission spectroscopy results show that a linear composition variation for Zn1-xMgxO with amorphous phase can be obtained by varying sputtering power, which results in increasing optical bandgap linearly with x for better light transmission. However, conductivity drops dramatically as soon as magnesium is introduced. On the other hand, hydrogen doping is demonstrated to enhance both crystallinity and conductivity, which was then degraded upon annealing. However, only being exposed to atmosphere would not change conductivity, implying the characteristics of chemical adsorption of hydrogen in the films. The larger grained morphology of the thin films doped with hydrogen was ascribed to both surface fast diffusion and etching. Both dopants can be applied to improve the properties of zinc oxide films.",

author = "Huang, {Jun Hang} and Liu, {Chuan Pu}",

note = "Funding Information: This work was sponsored by the National Science Counsel, Taiwan, under project number of NSC93-2120-M-006-009. We are grateful for the provision of FE-SEM equipment from the Center for Micro/Nano Technology Research, National Cheng Kung University, Taiwan.; Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD ; Conference date: 12-11-2004 Through 14-11-2004",

year = "2006",

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doi = "10.1016/j.tsf.2005.07.066",

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T1 - The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

AU - Huang, Jun Hang

AU - Liu, Chuan Pu

N1 - Funding Information: This work was sponsored by the National Science Counsel, Taiwan, under project number of NSC93-2120-M-006-009. We are grateful for the provision of FE-SEM equipment from the Center for Micro/Nano Technology Research, National Cheng Kung University, Taiwan.

PY - 2006/3/1

Y1 - 2006/3/1

N2 - Polycrystalline ZnO thin films doped with magnesium or hydrogen were prepared on Corning 7059 glass substrates by RF magnetron co-sputtering or reactive sputtering. The chemistry, morphology, phase evolution and optical properties of the resulting thin films with various deposition parameters were investigated. X-ray photoemission spectroscopy results show that a linear composition variation for Zn1-xMgxO with amorphous phase can be obtained by varying sputtering power, which results in increasing optical bandgap linearly with x for better light transmission. However, conductivity drops dramatically as soon as magnesium is introduced. On the other hand, hydrogen doping is demonstrated to enhance both crystallinity and conductivity, which was then degraded upon annealing. However, only being exposed to atmosphere would not change conductivity, implying the characteristics of chemical adsorption of hydrogen in the films. The larger grained morphology of the thin films doped with hydrogen was ascribed to both surface fast diffusion and etching. Both dopants can be applied to improve the properties of zinc oxide films.

AB - Polycrystalline ZnO thin films doped with magnesium or hydrogen were prepared on Corning 7059 glass substrates by RF magnetron co-sputtering or reactive sputtering. The chemistry, morphology, phase evolution and optical properties of the resulting thin films with various deposition parameters were investigated. X-ray photoemission spectroscopy results show that a linear composition variation for Zn1-xMgxO with amorphous phase can be obtained by varying sputtering power, which results in increasing optical bandgap linearly with x for better light transmission. However, conductivity drops dramatically as soon as magnesium is introduced. On the other hand, hydrogen doping is demonstrated to enhance both crystallinity and conductivity, which was then degraded upon annealing. However, only being exposed to atmosphere would not change conductivity, implying the characteristics of chemical adsorption of hydrogen in the films. The larger grained morphology of the thin films doped with hydrogen was ascribed to both surface fast diffusion and etching. Both dopants can be applied to improve the properties of zinc oxide films.

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JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

T2 - Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD

Y2 - 12 November 2004 through 14 November 2004

ER -

The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

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